IP Library Granted Patent US 8,142,619
Granted Patent B2
US 8,142,619 · App. 12/151,766 · Granted Mar 27, 2012

Shape of cone and air input annulus

Assignee: SDC Materials Inc.
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Quick Facts
Patent No.
US 8,142,619
App. No.
12/151,766
Granted
Mar 27, 2012
Kind
B2
Abstract

A constricting chamber having first and second ends, the chamber comprising: an interior surface formed between the first and second ends, disposed circumferentially around and defining an interior space and a longitudinal axis of the chamber; a frusto-conical surface disposed between the first and second ends and narrowing as it extends away from the first end and into the second end; an ejection port disposed at the second end and substantially aligned with the longitudinal axis; a cover disposed at the first end, substantially perpendicular to the longitudinal axis, and comprising a center substantially aligned with the longitudinal axis; an injection port disposed on the cover proximate the center, and configured to receive a reactive mixture into the chamber; and an annular supply portion disposed circumferentially around the longitudinal axis and comprising supply port(s) configured to supply conditioning fluid into the chamber in an annular formation along the interior surface.

Claims (22)

1. A method of conditioning a reactive mixture, the method comprising:

providing a constricting chamber having a first end, a second end opposite the first end, and an interior surface formed between the first end and the second end and disposed circumferentially around and defining an interior space and a longitudinal axis of the constricting chamber, a frusto-conical surface formed from the interior surface and narrowing as it extends away from the first end and into the second end, and a cover disposed at the first end of the constricting chamber substantially perpendicular to the longitudinal axis and comprising a center substantially aligned with the longitudinal axis;

an energy supply device applying a plasma stream to a precursor material, thereby vaporizing the precursor material and forming the reactive mixture, wherein the reactive mixture comprises vaporized precursor material entrained within the plasma stream, and wherein the precursor material is provided to the energy supply device in powder form;

flowing the reactive mixture into the interior space of the constricting chamber through a reactive mixture injection port disposed on the cover of the constricting chamber proximate the center;

flowing a conditioning fluid into the interior space of the constricting chamber through an annular supply portion in an annular formation along the interior surface of the constricting chamber, wherein the annular supply portion comprises one or more supply ports disposed circumferentially around the longitudinal axis, and the annular supply portion comprises one or more supply ports disposed on the cover in an annular formation around the reactive mixture injection port and configured to supply conditioning fluid into the constricting chamber along the interior surface, wherein the annular supply portion is distinct from the reactive mixture injection port such that the conditioning fluid is supplied into the interior space of the constricting chamber through a different port than the reactive mixture, wherein the one or more supply ports disposed on the cover comprise one or more openings in a direction substantially parallel to the longitudinal axis of the constricting chamber;

cooling the reactive mixture within the interior space of the constricting chamber, thereby forming a cooled mixture; and

flowing the cooled mixture through an ejection port disposed at the second end of the constricting chamber, wherein the ejection port is substantially aligned with the longitudinal axis.

2. The method of claim 1 , wherein the annular supply portion comprises a plurality of supply ports disposed in an annular formation around the reactive mixture injection port and configured to supply conditioning fluid into the constricting chamber along the interior surface.

3. The method of claim 1 , wherein the annular supply portion comprises one continuous supply port disposed in an annular formation around the reactive mixture injection port and configured to supply conditioning fluid into the constricting chamber along the interior surface.

4. The method of claim 1 , wherein a second annular supply portion is disposed along the interior surface of the constricting chamber.

5. The method of claim 4 , wherein the second annular supply portion comprises a plurality of supply ports disposed in an annular formation on the interior surface of the constricting chamber and configured to supply conditioning fluid into the constricting chamber along the interior surface.

6. The method of claim 4 , wherein the second annular supply portion comprises one continuous supply port disposed in an annular formation on the interior surface of the constricting chamber and configured to supply conditioning fluid into the constricting chamber along the interior surface.

7. The method of claim 1 , wherein the step of flowing the reactive mixture into the interior space of the constricting chamber is preceded by the steps of:

the energy supply device receiving a working gas from a working gas supply device;

the energy supply device delivering energy to the working gas to form the plasma stream; and

the energy supply device receiving the precursor material from a precursor supply device.

8. The method of claim 1 , wherein:

the conditioning fluid flows into the constricting chamber at a cooler temperature than the temperature at which the reactive mixture flows into the constricting chamber; and

the conditioning fluid flows into the constricting chamber at a higher flow rate than the flow rate at which the reactive mixture flows into the constricting chamber.

9. The method of claim 1 , wherein the conditioning fluid is an inert gas.

10. The method of claim 9 , wherein the inert gas is argon.

11. The method of claim 1 , wherein the one or more supply ports are mounted flush to the interior surface of the constricting chamber.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 16, 2018
From: SM (ASSIGNMENT FOR THE BENEFIT OF CREDITORS), LLC
To: UMICORE AG & CO. KG
Reel/Frame 045350/0280 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 8, 2008
From: LAYMAN, FREDERICK P.; BIBERGER, MAXIMILLIAN A.
To: SDC MATERIALS, INC.
Reel/Frame 020985/0976 →
Continuity (2)
Provisional Application 60928946 · May 11, 2007
Related Publication 20080277266A1 · Nov 13, 2008