Organic light emitting diode display device and method of fabricating the same
Provided is an organic light emitting diode (OLED) display device, including: a substrate; a semiconductor layer on the substrate; a gate insulating layer on the substrate with the semiconductor layer; a gate electrode on a region of the gate insulating layer corresponding to the semiconductor layer and insulated from the semiconductor layer; source and drain electrodes connected to the semiconductor layer; metal layers on the source and drain electrodes, spaced a distance apart from each other, and including nickel; a passivation layer over the gate insulating layer; a first electrode on the passivation layer, and electrically connected to the metal layers; an organic layer on the first electrode; and a second electrode on the organic layer.
1. An organic light emitting diode (OLED) display device, comprising:
a substrate;
a semiconductor layer on the substrate;
a gate insulating layer on the substrate with the semiconductor layer;
a gate electrode on a region of the gate insulating layer corresponding to the semiconductor layer and insulated from the semiconductor layer;
source and drain electrodes connected to the semiconductor layer;
metal layers on and contacting one of the source and drain electrodes, the metal layers being spaced from each other and comprising nickel;
a passivation layer on the substrate with the gate insulating layer;
a first electrode on the passivation layer, and electrically connected to the metal layers;
an organic layer on the first electrode; and
a second electrode on the organic layer.
2. The OLED display device according to claim 1 , wherein the source and drain electrodes have a thickness between about 3000 Å and about 4000 Å.
3. The OLED display device according to claim 1 , wherein the source and drain electrodes comprise aluminum.
4. The OLED display device according to claim 1 , wherein the metal layers have a thickness between about 0.1 nm and about 0.5 nm.
5. The OLED display device according to claim 1 , wherein the distance between the metal layers is between about 0.01 μm and about 3 μm.
6. The OLED display device according to claim 1 , wherein the passivation layer comprises a via hole, and the metal layers are in the via hole.
7. An organic light emitting diode (OLED) display device, comprising:
a substrate;
a semiconductor layer on the substrate;
a gate insulating layer on the substrate with the semiconductor layer;
a gate electrode on the gate insulating layer corresponding to the semiconductor layer;
an interlayer insulating layer on the gate insulating layer;
source and drain electrodes extending through the interlayer insulating layer and connected to the semiconductor layer;
a passivation layer on the interlayer insulating layer and the source and drain electrodes;
a first electrode on the passivation layer, the first electrode comprising: a reflective layer coupled to one of the source and drain electrodes; metal layers on and contacting the reflective layer, the metal layers being spaced from each other, and comprising nickel; and a transparent conductive layer on the metal layers;
an organic layer on the first electrode; and
a second electrode on the organic layer.
8. The OLED display device according to claim 7 , wherein the metal layers have a thickness between about 0.1 nm and about 0.5 nm.
9. The OLED display device according to claim 7 , wherein the distance between the metal layers is between about 0.01 μm and about 3 μm.
10. The OLED display device according to claim 7 , wherein the source and drain electrodes comprise aluminum.
11. A method of fabricating an organic light emitting diode (OLED) display device, the method comprising:
forming a semiconductor layer on a substrate;
forming a gate insulating layer on the substrate with the semiconductor layer;
forming a gate electrode in a region corresponding to the semiconductor layer on the gate insulating layer;
forming an interlayer insulating layer on the gate insulating layer and the gate electrode;
forming source and drain electrodes connected to the semiconductor layer through a contact hole in the interlayer insulating layer;
forming a plurality of metal material layers on and contacting one of the source and drain electrodes, the metal material layers being spaced from each other;
forming a passivation layer on the interlayer insulating layer and the metal material layers;
forming a first electrode electrically connected to the metal material layers, and on the passivation layer;
forming an organic layer on the first electrode; and
forming a second electrode on the organic layer.
12. The method according to claim 11 , wherein the metal material layers are formed by sputtering.
13. The method according to claim 11 , wherein the metal material layers are formed in a via hole of the passivation layer by patterning.
14. The method according to claim 11 , wherein the substrate with the first electrode is annealed at a temperature between about 150° C. and about 400° C. after the first electrode has been formed.
15. A method of fabricating an organic light emitting diode (OLED) display device, the method comprising:
forming a semiconductor layer on a substrate;
forming a gate insulating layer on the semiconductor layer;
forming a gate electrode in a region corresponding to the semiconductor layer on the gate insulating layer;
forming an interlayer insulating layer on the gate insulating layer and the gate electrode;
forming source and drain electrodes connected to the semiconductor layer through a contact hole in the interlayer insulating layer;
forming a passivation layer on the source and drain electrodes, and the gate insulating layer;
forming a via hole in the passivation layer to partially expose the source and drain electrodes;
forming a plurality of metal material layers on and contacting one of the source and drain electrodes, the metal material layers being spaced from each other;
forming a first electrode electrically connected to the metal material layers, and on the passivation layer;
forming an organic layer on the first electrode; and
forming a second electrode on the organic layer.
16. The method according to claim 15 , wherein the metal material layers are formed by sputtering.
17. The method according to claim 15 , wherein the substrate with the first electrode is annealed at a temperature between about 150° C. and about 400° C. after the first electrode has been formed.
18. A method of fabricating an organic light emitting diode (OLED) display device, the method comprising:
forming a semiconductor layer on a substrate;
forming a gate insulating layer on the semiconductor layer;
forming a gate electrode in a region corresponding to the semiconductor layer on the gate insulating layer;
forming an interlayer insulating layer on the gate insulating layer with the gate electrode;
forming source and drain electrodes connected to the semiconductor layer through a contact hole in the interlayer insulating layer;
forming a passivation layer over the interlayer insulating layer and the source and drain electrodes;
forming a first electrode by sequentially stacking a reflective layer connected to one of the source and drain electrodes on the passivation layer, metal layers on and contacting the reflective layer, the metal layers being spaced from each other and comprising nickel, and a transparent conductive layer on the metal layers;
forming an organic layer on the first electrode; and
forming a second electrode on the organic layer.
19. The method according to claim 18 , wherein the metal layers are formed by sputtering.
20. The method according to claim 18 , wherein the substrate with the first electrode is annealed at a temperature between about 150° C. and about 400° C. after the first electrode has been formed.