Semiconductor wafer
View Patent ↗A semiconductor wafer includes an insulation substrate with transparency; a silicon semiconductor layer formed on the insulation substrate; a chip forming area defined on the silicon semiconductor layer; a scribe line area defined on the silicon semiconductor layer for dividing the chip forming area; and an opaque pattern layer formed in the scribe line area. A plurality of opaque pattern portions is arranged apart from each other in the opaque pattern layer.
1. A semiconductor wafer, comprising:
an insulation substrate with transparency;
a silicon semiconductor layer formed on the insulation substrate;
a chip forming area defined on the silicon semiconductor layer;
a scribe line area defined on the silicon semiconductor layer for dividing the chip forming area;
an opaque pattern layer formed in the scribe line area, said opaque pattern layer including a first opaque pattern layer and a second opaque pattern layer; and
a plurality of opaque pattern portions arranged apart from each other in the opaque pattern layer.
2. The semiconductor wafer according to claim 1 , further comprising an interlayer insulation film disposed between the first opaque pattern layer and the second opaque pattern layer.
3. The semiconductor wafer according to claim 1 , wherein said opaque pattern portions include first opaque pattern portions formed in the first opaque pattern layer and second opaque pattern portions formed in the second opaque pattern layer, said first opaque pattern portions being arranged to cover spaces between the second opaque pattern portions in a plan view.
4. The semiconductor wafer according to claim 1 , wherein said opaque pattern portions are formed of a metal conductive film.
5. The semiconductor wafer according to claim 3 , wherein at least ones of said first opaque pattern portions and said second opaque pattern portions are formed of a poly-silicon film.
6. The semiconductor wafer according to claim 3 , wherein at least ones of said first opaque pattern portions and said second opaque pattern portions are arranged apart from each other by a distance greater than a minimum exposure enable distance.
7. The semiconductor wafer according to claim 1 , further comprising a TEG (Test Element Group) forming area defined in the scribe line forming area so that a TEG can be formed in the TEG forming area for confirming an electrical property of a semiconductor element, said TEG forming area being surrounded by the opaque pattern portions.