Nozzle-based, vapor-phase, plume delivery structure for use in production of thin-film deposition layer
View Patent ↗A vapor deposition source including a crucible configured to hold a quantity of molten constituent material and at least one nozzle to pass vapor evaporated from the molten constituent material out of the crucible.
1. A vapor deposition effusion source, comprising
an elongate vessel having a base, a pair of elongate side walls joined to the base, and a pair of end walls joined to the base and side walls, the vessel having an elongate axis oriented parallel to the elongate side walls, the walls having insulation for limiting heat loss, the vessel having a lid including plural nozzles spaced from each other along the elongate axis, wherein the lid includes a planar expanse perpendicular to the side walls of the vessel, each nozzle having a wall projecting upward perpendicular to the planar expanse, and
a heating element positioned on top of the planar expanse adjacent the wall of each nozzle, wherein the lid is the only part of the vessel that has a heating element.
2. The vapor deposition effusion vessel of claim 1 wherein the heating element is U-shaped following a path running adjacent opposing sides of each nozzle.
3. The vapor deposition effusion vessel of claim 1 wherein the lid has a U-shaped slot passing by opposing sides of each nozzle, the heating element being positioned in the slot.
4. The vapor deposition effusion vessel of claim 1 wherein the heating element is controllable to maintain the lid and nozzles at temperatures higher then the temperature of molten material contained within the vessel.
5. The vapor deposition effusion vessel of claim 1 wherein the heating element in the lid encircles the plural nozzles, and has electrical contacts connected to an electrical source on the same side of the vessel.
6. The vapor deposition effusion vessel of claim 1 each nozzle having an inner wall defining a depth, the heating element being embedded in the lid on a side of each nozzle adjacent substantially the entire depth of the nozzle.
7. The vapor deposition effusion vessel of claim 1 wherein the nozzles are integrally formed into the lid.
8. The vapor deposition effusion source of claim 1 , wherein the lid has a planar top surface, each nozzle having a wall extending upward from the top surface of the lid, to a rim defining an aperture for effusing vapor from inside the vessel.
9. A vapor deposition effusion source, comprising
an elongate vessel having a base, a pair of elongate side walls joined to the base, and a pair of end walls joined to the base and side walls, the vessel having an elongate axis oriented parallel to the elongate side walls, the walls having insulation for limiting heat loss, the vessel having a lid including plural nozzles spaced from each other along the elongate axis, and a heating element in the lid, the heating element in the lid being the only heater in the vessel.
10. The vapor deposition effusion source of claim 9 , wherein the lid has a planar top surface, each nozzle having a wall extending upward from the top surface of the lid, to a rim defining an aperture for effusing vapor from inside the vessel.
11. A vapor deposition effusion vessel comprising
an elongate vessel having a base, a pair of elongate side walls joined to the base, and a pair of end walls joined to the base and side walls, the vessel having an elongate axis oriented parallel to the elongate side walls, the vessel having a lid including plural nozzles spaced from each other along the elongate axis, a continuous heating element in the lid encircling the plural nozzles, the heating element being U-shaped, following a path running adjacent opposing sides of each nozzle, and having electrical contacts connected to an electrical source on the same side of the vessel, the electrical source for the heating element being located adjacent an end wall of the vessel, each nozzle having an inner wall defining a depth, the heating element being embedded in the lid on a side of each nozzle adjacent substantially the entire depth of the nozzle, the walls of the vessel having insulation layers to limit heat loss, the lid being the only part of the vessel having a heating element for supplying substantially all of the heat required to evaporate material from within the walls of the vessel through the nozzles.
12. The vapor deposition effusion source of claim 11 , wherein the lid has a planar top surface, each nozzle having a wall extending upward from the top surface of the lid, to a rim defining an aperture for effusing vapor from inside the vessel.