Nozzle-based, vapor-phase, plume delivery structure for use in production of thin-film deposition layer
View Patent ↗A vapor deposition source including a crucible configured to hold a quantity of molten constituent material and at least one nozzle to pass vapor evaporated from the molten constituent material out of the crucible.
1. A vapor deposition effusion system comprising
a chamber,
a pay-out roll of flexible strip material feeding downstream along a processing path through the chamber to a take-up roll,
a series of five elongate, heated, vapor-delivery effusion sources spaced along the processing path below the strip material, each of the first, second, fourth, and fifth sources along the path containing gallium or indium, the third source containing copper, the second and third vessels being spaced sufficiently apart from each other so that a copper plume effused from the third source does not overlap with plumes effused from the first and second sources.
2. The vapor deposition effusion system of claim 1 , wherein each source includes an elongate vessel having a pair of elongate side walls, each vessel having an elongate axis oriented generally parallel to the elongate side walls, each vessel having a lid including plural nozzles spaced from each other along the elongate axis, and a heating element encircling the plural nozzles.
3. The vapor deposition effusion system of claim 2 , wherein each vessel is rectangular.
4. The vapor deposition effusion system of claim 2 , wherein the heating element in each lid has electrical contacts connected to an electrical source on the same side of the vessel.
5. The vapor deposition effusion system of claim 2 , wherein the heating element is U-shaped following a path running adjacent opposing sides of each nozzle.
6. The system of claim 2 , wherein the lid has a U-shaped slot passing by opposing sides of each nozzle, the heating element being positioned in the slot.
7. The system of claim 2 , wherein the heating element is controllable to maintain the lid and nozzles at temperatures higher then the temperature of molten material contained within the vessel.
8. The system of claim 2 , wherein the walls of the vessel contain insulation layers to limit heat loss from the vessel, the heating element in the lid configured to supply substantially all of the heat required to evaporate material from within the walls of the vessel through the nozzles in the lid.
9. The system of claim 2 , wherein the lid is the only part of the vessel that has a heating element.