Method for fabricating semiconductor device
An object of the present invention is to provide a method for fabricating a semiconductor device capable of implementing planarization of an insulating film formed on a semiconductor substrate formed thereon with a circuit pattern and inhibiting unevenness of a film thickness of the insulating film, and a device thereof. According to the present invention, when etching is progressed to an A-A line, a part of a BPSG film 14 is exposed from an SOG film 16. A point at which the part of the BPSG film 14 is exposed is an “exposure start point”. A change of a plasma emission intensity of oxygen atoms during etching is observed to detect the “exposure start point”. An EPD detection in which an “etching end point” is set using the “exposure start point” as a reference is performed. The etching is continued even after a start of exposure of the BPSG film 14. Before a B-B line at which an entire surface of the BPSG film 14 is exposed is reached, the etching is ended at a C-C line.
1 . A method for fabricating a semiconductor device, comprising:
forming on a semiconductor substrate having a circuit pattern thereon, a silicon oxide film and a spin on glass film (SOG film), as an insulating film, in this order;
flattening the insulating film by plasma etching;
observing a change of a plasma emission intensity of oxygen atoms during the etching to detect an exposure start point of the silicon oxide film of which the plasma emission intensity becomes constant, and then, starts increasing again; and
ending the plasma etching at the exposure start point or within a predetermined time from the exposure start point.
2 . The method for fabricating a semiconductor device according to claim 1 , wherein
the plasma etching is ended before an entire-surface exposed point of the silicon oxide film of which the plasma emission intensity becomes constant again.
3 . The method for fabricating a semiconductor device according to claim 1 , wherein
the silicon oxide film is a silicon oxide film (BPSG film) to which phosphorus and boron are added.