Method for fabricating semiconductor chip
View Patent ↗After a film layer 6 formed from a die attach film 4 and a UV tape 5 has been provided as a mask on a semiconductor wafer 1 , boundary trenches 7 for partitioning semiconductor elements 2 formed on a circuit pattern formation surface 1 a are formed in the film layer 6 , thereby making a surface 1 c of a semiconductor wafer 1 exposed. The exposed surface 1 c of the semiconductor wafer 1 in the boundary trenches 7 is etched by means of plasma of a fluorine-based gas, and the semiconductor wafer 1 is sliced into semiconductor chips 1 ′ along the boundary trenches 7.
1. A method for fabricating a semiconductor chip, comprising:
a masking step of providing a mask, on a mask formation surface opposite a circuit pattern formation surface of a semiconductor wafer, a film layer formed from a die attach film to be fixed to the mask formation surface and a heat-resistant film to be affixed to an exterior surface of the die attach film, wherein the die attach film is a film-shape adhesive;
a boundary trench forming step of forming, in the film layer provided on the semiconductor wafer, boundary trenches for portioning semiconductor elements formed on the circuit formation pattern formation surface of the semiconductor wafer, to thus make a surface of the semiconductor wafer exposed through the boundary trenches; and
a plasma etching step of etching the surface of the semiconductor wafer exposed through the boundary trenches by means of plasma of a fluorine-based gas, to thus separate the semiconductor wafer into semiconductor chips along the boundary trenches.
2. The method for fabricating a semiconductor chip according to claim 1 ,
wherein a protective film for protecting the semiconductor elements is affixed onto the circuit pattern formation surface of the semiconductor wafer before the masking step; a die bonding tape is affixed to an exterior surface of the film layer after the plasma etching step; and
the protective film is removed from the circuit pattern formation surface of the semiconductor wafer.
3. The method for fabricating a semiconductor chip according to claim 1 , wherein there is performed, after the plasma etching step, processing pertaining to an adhesive strength decreasing step for decreasing adhesive strength acting between the die attach film and the heat-resistant film.
4. The method for fabricating a semiconductor chip according to claim 3 , wherein processing pertaining to the adhesive strength decreasing step is performed after removal of the protective film from the circuit pattern formation surface of the semiconductor wafer.
5. The method for fabricating a semiconductor chip according to claim 1 , wherein the heat-resistant film is formed from a UV tape.
6. The method for fabricating a semiconductor chip according to claim 1 , wherein formation of the boundary trenches in the film layer in the boundary trench formation step is performed by cutting the film layer through use of a laser beam.
7. The method for fabricating a semiconductor chip according to claim 6 , wherein processing pertaining to the boundary trench surface smoothing step for smoothing surfaces of the boundary trenches formed in the film layer by means of plasma of an oxygen gas or plasma of a gas mixture containing oxygen as a principal ingredient is performed between the boundary trench formation step and the plasma etching step.