Ceramic laminated device and method for manufacturing same
View Patent ↗The present invention relates to a ceramic laminated device including a dielectric ceramic and an Ag electrode. In a dielectric ceramic that can be sintered at low temperatures and has a high dielectric constant and Q value, reactivity between the ceramic and Ag during sintering is suppressed low and segregation of specific elements in the proximity of the electrode is controlled. Thus, a filter having a high Q value and low loss is produced stably. For this purpose, in a ceramic laminated body including at least a ceramic and a Si-containing glass, a ratio of A/B, i.e. a ratio of a Si element concentration (A) within a range at a distance of 5 μm or smaller from the Ag electrode to a Si element concentration (B) within a range at a distance larger than 5 μm from the Ag electrode, is set equal to or smaller than 2.
1. A ceramic laminated device made by sintering a ceramic laminated body including at least a ceramic and a Si-containing glass, the ceramic laminated device comprising:
an internal electrode including Ag,
wherein a ratio of A/B, i.e. a ratio of a Si element concentration (A) within a range at a distance of 5 μm or smaller from the internal electrode to a Si element concentration (B) within a range at a distance larger than 5 μm from the internal electrode, is equal to or smaller than 2.
2. The ceramic laminated device of claim 1 , wherein at least one layer of the internal electrode having a thickness equal to or larger than 15 μm after sintering is included therein.
3. The ceramic laminated device of claim 2 , wherein at least one layer of the internal electrode having a thickness equal to or smaller than 10 μm after sintering is included therein.
4. The ceramic laminated device of claim 1 , wherein ZnO is included in the glass.
5. The ceramic laminated device of claim 1 , wherein the glass is Si-alkali earth metal-La—O-based.
6. The ceramic laminated device of claim 1 , wherein the ceramic includes Ba, a rare-earth element, Ti, Bi, and O.
7. A method for manufacturing the ceramic laminated device of claim 1 , wherein an oxygen concentration during sintering of the ceramic laminated device is equal to or smaller than 10 vol %.
8. A ceramic laminated device made by sintering a ceramic laminated body including at least a ceramic, a Si-containing glass, and ZnO, the ceramic laminated device comprising:
an internal electrode including Ag,
wherein a ratio of C/D, i.e. a ratio of a Zn element concentration (C) within a range at a distance of 5 μm or smaller from the internal electrode to a Zn element concentration (D) within a range at a distance larger than 5 μm from the internal electrode, is equal to or smaller than 4.
9. The ceramic laminated device of claim 8 , wherein at least one layer of the internal electrode having a thickness equal to or larger than 15 μm after sintering is included therein.
10. The ceramic laminated device of claim 8 , wherein ZnO is included in the glass.
11. The ceramic laminated device of claim 8 , wherein the glass is Si-alkali earth metal-La—O-based.
12. The ceramic laminated device of claim 8 , wherein the ceramic includes Ba, a rare-earth element, Ti, Bi, and O.
13. A method for manufacturing the ceramic laminated device of claim 8 , wherein an oxygen concentration during sintering of the ceramic laminated device is equal to or smaller than 10 vol %.