Semiconductor device with pads of enhanced moisture blocking ability
View Patent ↗A semiconductor device is provided having a pad with an improved moisture blocking ability. The semiconductor device has: a circuit portion including a plurality of semiconductor elements formed on a semiconductor substrate; lamination of insulator covering the circuit portion, including a passivation film as an uppermost layer having openings; ferro-electric capacitors formed in the lamination of insulator; wiring structure formed in the lamination of insulator and connected to the semiconductor elements and the ferro-electric capacitors; pad electrodes connected to the wiring structure, formed in the lamination of insulator and exposed in the openings of the passivation film; a conductive pad protection film, including a Pd film, covering each pad electrode via the opening of the passivation film, and extending on the passivation film; and stud bump or bonding wire connected to the pad electrode via the conductive pad protection film.
1. A semiconductor device comprising:
a semiconductor substrate;
a circuit portion including a plurality of semiconductor elements formed on said semiconductor substrate;
lamination of insulator covering said circuit portion, formed on said semiconductor substrate and including a passivation film as an uppermost layer having an opening;
a ferro-electric capacitor formed in said lamination of insulator;
a wiring structure formed in said lamination of insulator and connected to said semiconductor elements and said ferro-electric capacitor;
a pad electrode structure connected to said wiring structure, formed in said lamination of insulator and exposed in the opening of said passivation film;
a conductive pad protection film including a Pd film, formed on said lamination of insulator, covering said pad electrode structure via the opening of said passivation film, and extending on said passivation film; and
a stud bump or a bonding wire coupling to a partial area of said conductive pad protection film, and connected to said pad electrode structure via said conductive pad protection film,
wherein said pad electrode structure has an uppermost surface having a flaw.
2. The semiconductor device according to claim 1 , wherein said pad electrode structure has an uppermost surface of aluminum or aluminum alloy.
3. The semiconductor device according to claim 2 , wherein said conductive pad protection film covers a surface of said flaw.
4. The semiconductor device according to claim 3 , wherein said conductive pad protection film includes a Ti film contacting said uppermost surface of aluminum or aluminum alloy.
5. The semiconductor device according to claim 4 , wherein said conductive pad protection film includes a TiN film or a Ti—Al—N film between said Pd film and said Ti film.
6. The semiconductor device according to claim 1 , further comprising a conductive capacitor protection film made of a same film as said conductive pad protection film and extending on said passivation film above said ferro-electric capacitor in a state electrically separated from said conductive pad protection film.
7. The semiconductor device according to claim 1 , wherein said pad electrode structure is formed on a planar surface.
8. The semiconductor device according to claim 1 , wherein said stud bump or said bonding wire directly contacts said conductive pad protection film.
9. The semiconductor device according to claim 1 , further comprising a plurality of conductive plugs disposed under and directly connected with said pad electrode structure.