IP Library Granted Patent US 7,994,419
Granted Patent B2
US 7,994,419 · App. 12/167,583 · Granted Aug 9, 2011

Methods for fabricating thin film III-V compound solar cell

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Quick Facts
Patent No.
US 7,994,419
App. No.
12/167,583
Granted
Aug 9, 2011
Kind
B2
Abstract

The present invention utilizes epitaxial lift-off in which a sacrificial layer is included in the epitaxial growth between the substrate and a thin film III-V compound solar cell. To provide support for the thin film III-V compound solar cell in absence of the substrate, a backing layer is applied to a surface of the thin film III-V compound solar cell before it is separated from the substrate. To separate the thin film III-V compound solar cell from the substrate, the sacrificial layer is removed as part of the epitaxial lift-off. Once the substrate is separated from the thin film III-V compound solar cell, the substrate may then be reused in the formation of another thin film III-V compound solar cell.

Claims (18)

1. A method for forming a thin film multiple junction III-V compound solar cell, the method comprising:

forming a first thin film III-V compound solar cell on a first substrate,

forming a second thin film III-V compound solar cell on a second substrate,

lifting by epitaxial lift off one of the first thin film III-V compound solar cell from the first substrate or the second thin film III-V compound solar cell from the second substrate,

wafer bonding the first and the second thin film III-V compound solar cell to form a wafer bonded thin film multiple junction III-V compound solar cell, wherein the wafer bonding includes direct wafer to wafer contact, and

lifting by epitaxial lift off the wafer bonded thin film III-V compound solar cell from the remaining substrate.

2. The method of claim 1 further comprising, forming a backing layer on a surface of the wafer bonded thin film multiple junction III-V compound solar cell.

3. The method of claim 2 , wherein the backing layer is formed on the surface of the wafer bonded thin film multiple junction III-V compound solar cell having the lowest bandgap energy level.

4. The method of claim 1 further comprising, metallizing a surface of the wafer bonded thin film multiple junction III-V compound solar cell to form one or more metallized conductive paths.

5. The method of claim 4 , wherein the surface of the wafer bonded thin film multiple junction III-V compound solar cell having the highest bandgap energy is metallized with a grid of metallized conductors.

6. The method of claim 1 further comprising, forming an antireflection coating a surface of the wafer bonded thin film multiple junction III-V compound solar cell.

7. The method of claim 6 , wherein the antireflection coating is formed on the surface of the junction having the highest bandgap energy in the wafer bonded thin film multiple junction III-V compound solar.

8. A method for forming a thin film multiple junction III-V compound solar cell, the method comprising:

forming a first thin film III-V compound solar cell on a first substrate having at least one active layer,

forming a second thin film III-V compound solar cell on a second substrate having at least one active layer,

wafer bonding the first and the second thin film III-V compound solar cell to form a wafer bonded thin film multiple junction III-V compound solar cell, wherein the wafer bonding includes direct wafer to wafer contact,

removing a sacrificial layer from between the wafer bonded thin film multiple junction III-V compound solar cell and either the first substrate or the second substrate, and

lifting by epitaxial lift off the wafer bonded thin film III-V compound solar cell from the remaining substrate.

Assignments (5)
CONFIRMATORY LICENSE Recorded Feb 5, 2025
From: MICROLINK DEVICES, INC
To: U.S. DEPARTMENT OF ENERGY
Reel/Frame 070118/0479 →
RELEASE OF SECURITY INTEREST Recorded Aug 19, 2016
From: PNC BANK NATIONAL ASSOCIATION
To: MICROLINK DEVICES, INC.
Reel/Frame 039482/0650 →
SECURITY AGREEMENT Recorded Feb 23, 2012
From: MICROLINK DEVICES, INC.
To: PNC BANK, NATIONAL ASSOCIATION
Reel/Frame 027853/0736 →
CONFIRMATORY LICENSE Recorded Aug 27, 2010
From: MICROLINK DEVICES INC.
To: NASA
Reel/Frame 024901/0824 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 28, 2009
From: PAN, NOREN; HILLIER, GLEN; VU, DUY PHACH; TATAVARTI, RAO; YOUTSEY, CHRISTOPHER; MCCALLUM, DAVID; MARTIN, GENEVIEVE
To: MICROLINK DEVICES, INC.
Reel/Frame 023433/0404 →