Method of increasing yield in OFETs by using a high-K dielectric layer in a dual dielectric layer
View Patent ↗Dielectric layer pinholes in OFET structures are addressed in a method of fabricating OFET devices through the addition of a high-K dielectric layer to eliminate the effects of shorts in the dielectric layer. The original dielectric layer is maintained such that the semiconductor/dielectric interface remains unchanged. The high-K dielectric layer contributes material to the gate dielectric to plug up pinholes in the original dielectric, but does not contribute significant capacitance due to the high dielectric constant of the additional dielectric layer. The incidence of pinholes in the dielectric layer is reduced without significantly affecting the performance of the OFET transistor.
1. A method of fabricating an OFET having a dual dielectric layer comprising:
providing a patterned first conductive layer on an insulating substrate to form a gate electrode;
providing a first dielectric layer over the gate electrode, wherein the first dielectric layer has one or more pinholes;
providing a second dielectric layer over the first dielectric layer, wherein the second dielectric layer has a dielectric constant higher than the first dielectric layer dielectric constant, and wherein the second dielectric layer fills the one or more pinholes in the first dielectric layer;
providing a semiconductor layer over the second dielectric layer; and
providing a patterned second conductive layer to form source and drain contacts and a channel region therebetween in the semiconductor layer.
2. The method of claim 1 wherein the insulating substrate is selected from the group consisting of PET, PEN, glass, and Kapton.
3. The method of claim 1 wherein the first conductive layer is selected from the group consisting of PEDOT, carbon black, nano-particle solutions of inorganic materials, and pre-cursors of inorganic materials.
4. The method of claim 1 wherein the semiconductor layer comprises an organic semiconductor selected from the group consisting of polythiophene, solution-based pentacene, a solution-based inorganic semiconductor in the form of a precursor solution, and a solution-based inorganic semiconductor in the form of suspended nanoparticles.
5. The method of claim 1 wherein the first dielectric layer comprises organic materials selected from the group consisting of polyvinylphenol and derivatives, poly(3,4-ethylenedioythiophene), PVA, and CYPEL.
6. The method of claim 1 wherein the first dielectric layer dielectric constant is less than four.
7. The method of claim 1 wherein the second dielectric layer comprises an organic ferroelectric polymer.
8. The method of claim 1 wherein the second dielectric layer dielectric constant is greater than four.
9. The method of claim 1 wherein the second conductive layer is selected from the group consisting of nano-particle silver, a conductive polymer, flake-based silver inks, gold, zinc, and aluminum nanoparticles.
10. The method of claim 1 wherein the first dielectric layer is thicker than the second dielectric layer.