SEMICONDUCTOR DEVICE AND METHOD FOR PRODUCING THE SAME
A complementary semiconductor device comprising an n-channel transistor and a p-channel transistor, including: the n-channel transistor including a gate insulating film and a first metal gate electrode formed on the gate insulating film and having a first compound layer including a first metal (M 1 ) and silicon (Si); and the p-channel transistor including a gate insulating film and a second metal gate electrode formed on the gate insulating film and having a second compound layer including the first metal (M 1 ), a second metal (M 2 ), and silicon (Si), wherein the composition of the first compound layer is represented by a composition formula: M 1 Si x (1≦x), and the composition of the second compound layer is represented by a composition formula: M 1 M 2 Si y (0<y≦0.5).
1 . A complementary semiconductor device comprising an n-channel transistor and a p-channel transistor, comprising:
the n-channel transistor including a gate insulating film and a first metal gate electrode formed on the gate insulating film and having a first compound layer including a first metal (M 1 ) and silicon (Si); and
the p-channel transistor including a gate insulating film and a second metal gate electrode formed on the gate insulating film and having a second compound layer including the first metal (M 1 ), a second metal (M 2 ), and silicon (Si), wherein
the composition of the first compound layer is represented by a composition formula: M 1 Si x (1≦x), and
the composition of the second compound layer is represented by a composition formula: M 1 M 2 Si y (0<y≦0.5).
2 . The semiconductor device according to claim 1 , wherein the first metal gate has a W layer on the first compound layer.
3 . The semiconductor device according to claim 1 , wherein the first metal gate has a TiN layer and a NiSi layer on the first compound layer.
4 . The semiconductor device according to claim 1 , wherein the work function of the second metal (M 2 ) is higher than that of the first metal (M 1 ).
5 . The semiconductor device according to claim 1 , wherein the first metal (M 1 ) is a metal selected from the group consisting of Ta, Nb, V, Ti, Hf, Zr, and La.
6 . The semiconductor device according to claim 1 , wherein the second metal (M 2 ) is a metal selected from the group consisting of Ni, Pt, Ru, Ir, Pd, and Co.
7 . A method for producing a complementary semiconductor device having an n-channel transistor and a p-channel transistor, comprising the steps of:
preparing a semiconductor substrate;
defining an n-channel transistor formation region and a p-channel transistor formation region in the semiconductor substrate and forming a gate insulating film, a first compound layer including a first metal (M 1 ) and silicon (Si), and a dummy gate metal layer in the respective regions;
selectively removing the dummy gate metal layer in the p-channel transistor formation region;
forming a second metal (M 2 ) layer to cover the semiconductor substrate; and
forming a metal gate electrode of a second compound layer including the first metal (M 1 ), the second metal (M 2 ), and silicon (Si) by reacting the first compound layer and the second metal (M 2 ) layer in the p-channel transistor formation region by heat treatment.
8 . The semiconductor device production method according to claim 7 , wherein the composition of the first compound layer is represented by a composition formula: M 1 Si x (1≦x) and
the composition of the second compound layer is represented by a composition formula: M 1 M 2 Si y (0<y≦0.5).
9 . The semiconductor device production method according to claim 7 , wherein the work function of the second metal (M 2 ) is higher than that of the first metal (M 1 ).
10 . The semiconductor device production method according to claim 7 , wherein the first metal (M 1 ) is a metal selected from the group consisting of Ta, Nb, V, Ti, Hf, Zr, and La.
11 . The semiconductor device production method according to claim 7 , wherein the second metal (M 2 ) is a metal selected from the group consisting of Ni, Pt, Ru, Ir, Pd, and Co.