Laser repair structure and method for TFT-LCD
View Patent ↗A laser repair structure and method for TFT panel. A first metal conductor is located in the source-drain layer and having a contact hole to the pixel electrode, and the region of the first metal conductor is within the region of the storage capacitance line. To repair a white defect of a pixel, make extending portions of the first metal conductor to overlap with the gate line of the previous pixel so as to electrically connect them by the laser irradiation. Another choice is setting two second metal conductors located in the gate-electrode layer and partially overlapped with the data line and the first conductor separately, then using laser irradiation to electrically connect one second metal conductor to repair the white defect of a pixel or electrically connect two second metal conductors to repair an open-circuited data line.
1. A laser repair structure of a TFT panel, comprising a plurality of pixels, wherein each of said pixels further comprises: a substrate; a gate line formed on said substrate and extending in a row direction; a storage capacitance line formed on said substrate and separated from said gate line; a gate insulator formed on said substrate and covering said gate line and said storage capacitance line; a data line formed on said gate insulator and extending in a column direction; a passivation insulator covering said data line; a pixel electrode formed on said passivation insulator; a first metal conductor formed on said gate insulator and lying within the region of said storage capacitance line, wherein said first metal conductor is electrically connected to said pixel electrode through a first contact hole, and said storage capacitance line is electrically isolated from said first metal conductor by said gate insulator; and at least one second metal conductor formed on said substrate and partially overlapped with said data line and said first metal conductor separately, wherein both said data line and said first metal conductor are electrically isolated from said second metal conductor by said gate insulator.
2. The laser repair structure according to claim 1 , further comprising a semiconductor electrode formed on said gate insulator.
3. The laser repair structure according to claim 2 , further comprising a drain electrode formed on said semiconductor electrode and electrically connected to said pixel electrode through a second contact hole.
4. The laser repair structure according to claim 1 , wherein the material of said first metal conductor and said second metal conductor is selected from the group consisting of Al, Cu, Au, Cr, Ta, Ti, Mn, Ni, Mo, Nb, Nd, Ag and the combination thereof.
5. The laser repair structure according to claim 1 , wherein the material of said substrate is transparent glass.
6. The laser repair structure according to claim 1 , wherein the material of said pixel electrode is selected from the group consisting of indium tin oxide (ITO) and indium zinc oxide (IZO).
7. The laser repair structure according to claim 1 , wherein the material of said gate insulator and said passivation insulator is selected from the group consisting of oxide and nitride.
8. A laser repair method of a TFT panel, comprising forming a plurality of pixels, wherein the steps for forming at least one of said pixels comprise: providing a substrate; forming a gate line on said substrate, wherein said gate line extends in a row direction; forming a storage capacitance line on said substrate, wherein said storage capacitance line is separated from said gate line; forming a gate insulator on said substrate, wherein said gate insulator covers said gate line and said storage capacitance line; forming a data line on said gate insulator, wherein said data line extends in a column direction; forming a passivation insulator which covers said data line; forming a pixel electrode on said passivation insulator; forming a first metal conductor on said gate insulator, wherein said first metal conductor lies within the region of said storage capacitance line and is electrically connected to said pixel electrode through a first contact hole, and said storage capacitance line is electrically isolated from said first metal conductor by said gate insulator; forming two second metal conductors on said substrate, wherein said two second metal conductors are partially overlapped with said data line and said first metal conductor separately, wherein both said data line and said first metal conductor are electrically isolated from said second metal conductors by said gate insulator; irradiating at least one laser beam to at least one of the overlapped regions of said second metal conductors and said data line from the lower surface side of said substrate to electrically connect at least one of said two second metal conductors and said data line; and irradiating at least one laser beam to at least one of the overlapped regions of said second metal conductors and said first metal conductor from the lower surface side of said substrate to electrically connect at least one of said two second metal conductors and said first metal conductor.
9. The laser repair method according to claim 8 , further comprising forming a semiconductor electrode on said gate insulator.
10. The laser repair method according to claim 9 , further comprising forming a drain electrode on said semiconductor electrode, wherein said drain electrode is electrically connected to said pixel electrode through a second contact hole.
11. The laser repair method according to claim 8 , wherein the material of said first metal conductor and said second metal conductors is selected from the group consisting of Al, Cu, Au, Cr, Ta, Ti, Mn, Ni, Mo, Nb, Nd, Ag and the combination thereof.
12. The laser repair method according to claim 8 , wherein the material of said substrate is transparent glass.
13. The laser repair method according to claim 8 , wherein the material of said pixel electrode is selected from the group consisting of indium tin oxide (ITO) and indium zinc oxide (IZO).