IP Library Granted Patent US 9,162,445
Granted Patent B2
US 9,162,445 · App. 12/173,332 · Granted Oct 20, 2015

Liquid material discharge control method and droplet discharge device

Inventor: Yoichi Miyasaka (Nagano, JP)
Assignee: Seiko Epson Corporation
B41J2/04581B41J2/0456B41J2/0458B41J2/04573B41J2/04578B41J19/202B41J2202/20
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 9,162,445
App. No.
12/173,332
Granted
Oct 20, 2015
Kind
B2
Abstract

In a liquid material discharge control method, timing signals generated periodically are used to control discharge timing for discharging a liquid material from a plurality of nozzles onto a workpiece during a scan in which the nozzles and the workpiece are moved relative to each other. The liquid material discharge control method includes calculating a first elapsed time in a relative movement between the nozzles and the workpiece by counting a first prescribed number of outputs of the timing signals that define the discharge timing, comparing the first elapsed time with a first predicted time at which the nozzles are predicted to reach intended discharge positions on the workpiece, and discharging the liquid material from the nozzles onto the workpiece upon the first predicted time having elapsed when the first elapsed time is at least shorter than the first predicted time.

Claims (25)

1. A liquid material discharge control method comprising:

calculating a first elapsed time in a relative movement between a plurality of nozzles and a workpiece by counting a first prescribed number of outputs of timing signals that define discharge timing for discharging a liquid material from the nozzles onto the workpiece, the timing signals being encoder pulse signals generated by an encoder periodically during a scan in which the nozzles and the workpiece are moved relative to each other, the workpiece having a first film formation area and a second film formation area that are partitioned with a wall section on the workpiece and aligned in a main scanning direction, the calculating of the first elapsed time being performed for discharging the liquid into the first film formation area;

comparing the first elapsed time with a first predicted time at which the nozzles are predicted to reach intended discharge positions for discharging the liquid into the first film formation area;

discharging the liquid material from the nozzles into the first film formation area upon the first predicted time having elapsed when the first elapsed time is shorter than the first predicted time;

calculating a second elapsed time by counting a second prescribed number of outputs of the timing signals with the second prescribed number being obtained by subtracting a predetermined number of outputs of the timing signals from the first prescribed number for discharging the liquid into the first film formation area, the predetermined number being equal to or more than one;

comparing the second elapsed time with a second predicted time with the second predicted time being obtained by subtracting a predetermined time corresponding to the predetermined number from the first predicted time; and

discharging the liquid material from the nozzles onto the workpiece upon the first predicted time having elapsed in response to predicting that the first elapsed time is longer than the first predicted time; and

resynchronizing a subsequent discharge timing for commencing to discharge the liquid into the second film formation area by adjusting the subsequent discharge timing so as to synchronize with the timing signals during a prescribed time period in which no droplets are discharged from the nozzles and while the nozzles moves in a non-discharging area from the first film formation area to the second film formation area in the main scanning direction relative to the workpiece after ending discharging the liquid into the first film formation area, the non-discharging area including the wall section and being arranged between the first film formation area and the second file formation area in the main scanning direction.

2. The liquid material discharge control method according to claim 1 , wherein

the discharging of the liquid material includes applying at least one periodically generated drive waveform to a drive unit of each of the nozzles to discharge the liquid material as droplets from the nozzles, and selectively applying a subsequently generated drive waveform to the drive unit after output of a previously generated drive waveform has ended when the first elapsed time is shorter than the first predicted time or when the second elapsed time is shorter than the second predicted time.

3. The liquid material discharge control method according to claim 1 , wherein

the resynchronizing of the subsequent discharge timing includes correcting a number of outputs of the timing signals counted in the prescribed time period so as to coincide with a time period until a next intended discharge position.

4. The liquid material discharge control method according to claim 1 , wherein

the calculating of the first elapsed time, the comparing of the first elapsed time with the first predicted time, the discharging of the liquid material and the resynchronizing of the subsequent discharge timing are performed by dividing the relative movement during the scan into forward movement and reverse movement.

5. The liquid material discharge control method according to claim 4 , wherein

the workpiece has a plurality of film formation areas that includes the first film formation area and the second film formation area, are arrayed in the scanning direction, and are partitioned with respect with each other, and

the calculating of the first elapsed time, the comparing of the first elapsed time with the first predicted time, and the discharging of the liquid material and the resynchronizing of the subsequent discharge timing are performed during discharging the liquid into each film formation area, the resynchronizing is performed while no droplets are discharged from the nozzles and the nozzles moves between the film formation areas in the main scanning direction relative to the workpiece.

6. The liquid material discharge control method according to claim 5 , wherein

the discharging of the liquid material includes discharging a plurality of droplets from the nozzles onto each film formation area on the workpiece during the scan,

the calculating of the first elapsed time, the comparing of the first elapsed time with the first predicted time and the discharging of the liquid material are performed at an initial discharge of the droplets on each film formation area, and

at least one periodically generated drive waveform is applied to a drive unit of each of the nozzles to discharge the droplets from the nozzles.

7. The liquid material discharge control method according to claim 5 , wherein

the discharging of the liquid material includes discharging a plurality of droplets from the nozzles onto each film formation area on the workpiece during the scan, and discharging first droplets onto each of the film formation areas by counting a prescribed number of outputs of the timing signals that define the discharge timing,

the calculating of the first elapsed time, the comparing of the first elapsed time with the first predicted time and the discharging of the liquid material are performed when discharging second droplets onto each film formation area, and

at least one periodically generated drive waveform is applied to a drive unit of each of the nozzles when the droplets continue to be discharged.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 2, 2016
From: SEIKO EPSON CORPORATION
To: TOKYO ELECTRON LIMITED
Reel/Frame 038769/0522 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 15, 2008
From: MIYASAKA, YOICHI
To: SEIKO EPSON CORPORATION
Reel/Frame 021238/0425 →
Priority Claims (1)
JP 2007-207517 · Aug 9, 2007 · national
Continuity (1)
Related Publication 20090040253A1 · Feb 12, 2009