Active matrix organic EL display device and manufacturing method thereof
View Patent ↗An active matrix organic EL display device includes pixels each having an organic EL element ( 7 a ) and a pixel circuit ( 3 ) including a polysilicon TFT for controlling the organic EL element ( 7 a ) arranged adjacently in each of the regions partitioned into a matrix shape by data line ( 12 ) and gate line ( 11 ) that intersect each other. The organic EL element ( 7 a ) has a cathode ( 7 ) arranged in at least a region that excludes a space above the polysilicon TFT. The cathode ( 7 ) is arranged continuously over two or more adjacent pixels in the direction of gate line ( 11 ).
1. A method for manufacturing an active matrix organic EL display device including a pixel that has an organic EL element and a polysilicon TFT for controlling said organic EL element which are disposed adjacent to each other, the pixel being formed in each of regions partitioned into a matrix by a plurality of intersecting data lines and scanning lines, comprising the steps of:
forming on said substrate at least one cathode electrode wiring, then
forming said polysilicon TFT on a substrate, and
forming a cathode electrode of said organic EL element in a strip to be provided continuously over two or more adjacent pixels in a direction of said data line or scanning line, the position of which is opposite the side where said polysilicon TFT is connected, on said substrate with electron beam vapor deposition using a vapor deposition mask covering at least a region where said polysilicon TFT is formed,
wherein said cathode electrode wiring extends in a direction of the narrow area of the cathode electrode, and in forming said cathode electrode in the strip, connecting each of said cathode electrodes formed in strips to said cathode electrode wiring through contact holes.
2. The method for manufacturing an active matrix organic EL display device according to claim 1 , wherein said organic EL element includes a light-emitting region, further comprising the step of
forming said cathode electrode to cover said light-emitting regions of said two or more adjacent pixels.
3. The method for manufacturing an active matrix organic EL display device according to claim 1 , further comprising the step of forming said cathode electrode with material including lithium or a lithium compound and aluminum.