Flexible circuit electrode array device and a method for backside processing of a flexible circuit electrode device
The invention involves a flexible circuit electrode array device comprising: a polymer layer; wherein the polymer layer includes one or more metal traces, an electrode array; one or more bond pads; and the electrode array is located on the opposite side of the polymer layer. The invention further involves a method for backside processing of a flexible circuit electrode device, comprising: applying polymer film on a substrate; processing the front side; releasing the polymer film from substrate; flipping over the polymer film and fixing it onto the substrate; processing the backside; and final releasing of the polymer film from the substrate. The invention further involves a method for backside processing of a flexible circuit electrode device, comprising: processing the front side without releasing the polymer; processing the backside by sacrificial substrate method, or by laser drilling method; and releasing the polymer film from the substrate.
1. A method for backside processing of a polymer electrode array device, comprising:
applying a polymer layer on a substrate;
depositing a mask metal layer on the polymer and patterning the polymer; preparing the front side of the electrode array device;
releasing the polymer from the substrate;
flipping over the polymer and fixing it on the substrate;
removing the polymer from the substrate;
processing the backside electrode opening;
removing the mask metal layer; and
releasing the electrode array device from the substrate.
2. The method according to claim 1 , wherein the polymer contains polyimide.
3. The method according to claim 1 , wherein the mask metal layer contains aluminum.
4. The method according to claim 1 , wherein the polymer is released manually from the substrate.
5. The method according to claim 1 , wherein the backside electrode opening is achieved by reactive ion etching.
6. The method according to claim 1 , wherein the metal mask is removed by wet etching.