Nozzle arrangement for an inkjet printhead with a diffusion barrier
View Patent ↗Provided is a nozzle arrangement for an inkjet printhead. The arrangement includes a substrate defining an ink inlet channel and ink chamber with a CMOS layer deposited on top of the substrate, and a nozzle wall, roof and rim positioned on top of the substrate via which ink is operatively ejected from the chamber. The arrangement also includes an anchor atop the CMOS layer, said anchor linked to a stiffening beam by means of an actuator beam, the stiffening beam suspended from the CMOS layer by means of a passive beam and a carrier. Further included is a diffusion barrier about the ink chamber to inhibit the diffusion of hydroxyl ions through the CMOS layer.
1. A nozzle arrangement for an inkjet printhead, said arrangement comprising:
a substrate defining an ink inlet channel and ink chamber with a CMOS layer deposited on the substrate;
a nozzle wall, roof and rim positioned on the substrate via which ink is operatively ejected from the chamber;
an anchor atop the CMOS layer, said anchor linked to a stiffening beam by means of an actuator beam, the stiffening beam suspended from the CMOS layer by means of a passive beam and a carrier; and
a diffusion barrier about the ink chamber to inhibit the diffusion of hydroxyl ions through the CMOS layer.
2. The nozzle arrangement of claim 1 , wherein the CMOS layer defines a pair of aligned aluminium electrode contact layers at the anchor, said electrodes facilitating electrical thermal expansion of the actuator beam.
3. The nozzle arrangement of claim 1 , having a moving nozzle rim disposed at a lower end of the nozzle wall, said moving rim having a moving seal lip.
4. The nozzle arrangement of claim 3 , having an encircling wall surrounding the movable nozzle and including a stationary seal lip that, when the nozzle is at rest, is adjacent the moving rim to form a fluidic seal due to surface tension effects.
5. The nozzle arrangement of claim 1 , having a plurality of radially extending recesses defined in the roof about the nozzle rim to contain radial ink flow as a result of ink escaping past the nozzle rim.
6. The nozzle arrangement of claim 1 , wherein the stiffening beam includes a lever arm extending from the nozzle wall, said arm attached to the passive beam, another end of the passive beam being attached to the carrier.
7. The nozzle arrangement of claim 1 , wherein the actuator beam is formed from TiN.