IP Library › Patent Application 12178519
Patent Application
App. No. 12/178,519

Ultraviolet Polarization Beam Splitter with Minimum Apodization

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Quick Facts
Patent No.
US None
App. No.
12/178,519
Abstract

A beamsplitter includes a first fluoride prism and a second fluoride prism. A coating interface is between the first and second fluoride prisms, wherein an overall R(s)*T(p) function of the beamsplitter varies no more than ±2.74% in the range of 40-50 degrees of incidence.

Claims (24)

1 . A beamsplitter comprising:

a first fluoride prism;

a second fluoride prism;

a coating interface between the first and second fluoride prisms,

wherein a (R(s) function of the beamsplitter compensates for variations of a T(p) function of the beamsplitter such that variations of an apodization function of the beamsplitter is smaller than the variation of the T(p) function; and

wherein the coating interface includes alternating layers of first and second fluoride materials, the first fluoride material has a greater refractive index than the second fluoride material.

2 . The beamsplitter of claim 1 , wherein the coating interface includes alternating layers of MgF 2 and LaF 3 .

3 . The beamsplitter of claim 1 , wherein the coating interface includes alternating layers of NdF 3 and AlF 3 .

4 . The beamsplitter of claim 1 , wherein the first and second prisms include CaF 2 .

5 . The beamsplitter of claim 1 , wherein the overall R(s)*T(p) function of the beamsplitter varies no more than ±2.74% with reference to an average between the maximum value and the minimum value of the apodization function in the range of 35-55 degrees of incidence.

6 . The beamsplitter of claim 1 , wherein the beamsplitter operates at about 157.6 nm.

7 . The beamsplitter of claim 1 , wherein the beamsplitter operates at about 193 nm.

8 . A beamsplitter comprising:

a first prism;

a second prism;

a coating interface between the first and second prisms,

wherein the first and second prisms include fused silica;

wherein a R(s) function of the beamsplitter compensates for variations of a T(p) function of the beamsplitter such that variations of an apodization function of the beamsplitter is smaller than the variation of the T(p) function; and

wherein the coating interface includes alternating layers of first and second fluoride materials, the first fluoride material has a greater refractive index than the second fluoride material.

9 . The beamsplitter of claim 8 , wherein the coating interface includes alternating layers of MgF 2 and LaF 3 .

10 . The beamsplitter of claim 8 , wherein the coating interface includes alternating layers of NdF 3 and AlF 3 .

11 . The beamsplitter of claim 8 , wherein the overall R(s)*T(p) function of the beamsplitter varies no more than ±2.74% with reference to an average between the maximum value and the minimum value of the apodization function in the range of 35-55 degrees of incidence.

12 . The beamsplitter of claim 8 , wherein the beamsplitter operates at about 157.6 nm.

13 . The beamsplitter of claim 8 , wherein the beamsplitter operates at about 193 nm.