Semiconductor production method and semiconductor production device
The objective of the present invention is to prevent the variation in an ashing rate according to a temporal change within an ashing chamber. Then, in order to maintain the ashing rate, the decrease in the number of oxygen atoms in ashing gas within a process chamber 101 is indirectly monitored, and ashing gas, which is equivalent to the decreased number of oxygen atoms, is supplied. As a means to indirectly monitor this decrease amount, the valve travel of an APC valve 130 is monitored, and the decreased ashing gas is estimated, and the ashing gas is supplied.
1. A production method for a semiconductor device comprising an ashing step for ashing a semiconductor substrate where a metal wire is exposed on the surface of an insulating film, comprising:
a monitoring step to indirectly monitor a decrease amount of ashing gas to react with a resist during the ashing process; and
a supplying process to supply ashing gas according to the decrease amount.
2. The production method for a semiconductor device according to claim 1 , wherein gas containing oxygen atoms is used as the ashing gas.
3. The production method for a semiconductor device according to claim 1 , wherein in the monitoring step, the decrease amount is indirectly monitored based upon a valve travel of an auto pressure control valve to be used for pressure control of a chamber.