Laser patterning apparatus
A laser patterning apparatus for handling a donor film and improving compression uniformity between the donor film and an acceptor substrate is provided. The laser patterning apparatus includes: a stage that supports an acceptor substrate; a shielding mask that is placed on the acceptor substrate to form a pattern and is attached to a donor film on one surface thereof; a laser gun that is disposed at an upper part of the stage to radiate laser light to a portion of the donor film through the pattern of the shielding mask; a pressing member that corresponds to a portion of the shielding mask; and an actuator that is connected to one side of the pressing member to press the pressing member.
1. A laser patterning apparatus comprising:
a stage for supporting an acceptor substrate;
a shielding mask on the acceptor substrate and for forming a pattern and attaching to a donor film on one surface thereof;
a laser gun at an upper part of the stage for radiating laser light to a portion of the donor film through the pattern of the shielding mask;
a pressing member corresponding to a portion of the shielding mask; and
an actuator connected to one side of the pressing member and configured to press the pressing member toward the acceptor substrate.
2. The laser patterning apparatus of claim 1 , wherein the shielding mask comprises a glass substrate.
3. The laser patterning apparatus of claim 1 , wherein the shielding mask comprises:
a transfer area corresponding to the donor film; and
a non-transfer area corresponding to an outer side of the donor film at an outer side of the transfer area,
wherein the pressing member comprises a rim corresponding to at least a part of the non-transfer area.
4. The laser patterning apparatus of claim 3 , wherein, with respect to a plane of the stage, an interval is formed between the end of an inner side of the pressing member and the end of an outer side of the transfer area.
5. The laser patterning apparatus of claim 3 , wherein, with respect to a plane of the stage, the actuator corresponds to the center between the end of an outer side of the transfer area and the end of an outer side of the shielding mask.
6. The laser patterning apparatus of claim 3 , wherein the actuator comprises a plurality of cylinders and is symmetrically disposed with respect to the center of the donor film.
7. The laser patterning apparatus of claim 3 , wherein the pressing member comprises a quadrangular rim, and
the actuator comprises four cylinders at four corner portions of the quadrangular rim.
8. A laser patterning apparatus comprising:
a stage for supporting an acceptor substrate;
a shielding mask for forming a pattern on the acceptor substrate and attaching to a donor film on one surface thereof;
a laser gun at an upper part of the stage for radiating laser light to a portion of the donor film through the pattern of the shielding mask;
a pressing member for pressing a portion of the shielding mask without interrupting laser radiation of the laser gun; and
an actuator connected to one side of the pressing member and configured to press the pressing member toward the acceptor substrate.
9. The laser patterning apparatus of claim 8 , wherein the shielding mask comprises a glass substrate.
10. The laser patterning apparatus of claim 8 , wherein the shielding mask comprises:
a transfer area overlapping the donor film; and
a non-transfer area overlapping an outer side of the donor film at an outer side of the transfer area,
wherein the pressing member comprises a rim overlapping at least a part of the non-transfer area.
11. The laser patterning apparatus of claim 10 , wherein, with respect to a plane of the stage, an interval is formed between the end of an inner side of the pressing member and the end of an outer side of the transfer area.
12. The laser patterning apparatus of claim 10 , wherein, with respect to a plane of the stage, the actuator is on the center between the end of an outer side of the transfer area and the end of an outer side of the shielding mask.
13. The laser patterning apparatus of claim 10 , wherein the actuator comprises a plurality of cylinders and is symmetrically disposed with respect to the center of the donor film.
14. The laser patterning apparatus of claim 10 , wherein the pressing member comprises a quadrangular rim, and
the actuator comprises four cylinders at four corner portions of the quadrangular rim.