APPARATUS FOR MANUFACTURING THIN-FILM LAMINATED MEMBER AND METHOD OF CONVEYING THE MEMBER THEREIN

1 . An apparatus for manufacturing a thin-film laminated member by laminating a plurality of thin films on the surface of a band-shaped flexible substrate, the apparatus comprising:

a substrate conveying device for conveying the band-shaped flexible substrate horizontally with the band-shaped flexible substrate oriented vertically in the widthwise direction thereof;

a plurality of film forming chambers arranged in succession along the direction in which the band-shaped flexible substrate is conveyed for forming films on the surface of the band-shaped flexible substrate; and

at least a pair of upper grip rollers arranged between the plurality of film forming chambers and configured to pinch an upper edge portion of the band-shaped flexible substrate while the band-shaped substrate is being conveyed.

2 . The apparatus according to claim 1 , wherein a plurality of pairs of the upper grip rollers are arranged adjacent at least one of the film forming chambers for pinching the upper edge portion of the band-shaped flexible substrate.

3 . The apparatus according to claim 1 , wherein the direction of rotation of the pairs of the upper grip rollers is inclined obliquely upwardly with respect to the direction in which the band-shaped flexible substrate is conveyed.

4 . The apparatus according to claim 2 , wherein the direction of rotation of the pairs of the upper grip rollers is inclined obliquely upwardly with respect to the direction in which the band-shaped flexible substrate is conveyed.

5 . The apparatus according to claim 1 , further including at least one pair of lower grip rollers for pinching the lower edge portion of the band-shaped flexible substrate between the plurality of film forming chambers while the band-shaped flexible substrate is being conveyed.

6 . The apparatus according to claim 2 , further including at least one pair of lower grip rollers for pinching the lower edge portion of the band-shaped flexible substrate between the plurality of film forming chambers while the band-shaped flexible substrate is being conveyed.

7 . The apparatus according to claim 3 , further including at least one pair of lower grip rollers for pinching the lower edge portion of the band-shaped flexible substrate between the plurality of film forming chambers while the band-shaped flexible substrate is being conveyed.

8 . The apparatus according to claim 4 , further including at least one pair of lower grip rollers for pinching the lower edge portion of the band-shaped flexible substrate between the plurality of film forming chambers while the band-shaped flexible substrate is being conveyed.

9 . The apparatus according to claim 5 , wherein the direction of rotation of the pairs of lower grip rollers is inclined obliquely downwardly with respect to the direction in which the band-shaped flexible substrate is conveyed.

10 . The apparatus according to claim 6 , wherein the direction of rotation of the pairs of lower grip rollers is inclined obliquely downwardly with respect to the direction in which the band-shaped flexible substrate is conveyed.

11 . The apparatus according to claim 7 , wherein the direction of rotation of the pairs of lower grip rollers is inclined obliquely downwardly with respect to the direction in which the band-shaped flexible substrate is conveyed.

12 . The apparatus according to claim 8 , wherein the direction of rotation of the pairs of lower grip rollers is inclined obliquely downwardly with respect to the direction in which the band-shaped flexible substrate is conveyed.

13 . A method of conveying a band-shaped flexible substrate in an apparatus for manufacturing a thin-film laminated member by laminating a plurality of thin films on the surface of the band-shaped flexible substrate in a plurality of film forming chambers arranged in succession along the direction in which the band-shaped flexible substrate is conveyed, the method comprising the steps of:

conveying the band-shaped flexible substrate horizontally with the band-shaped flexible substrate oriented vertically in the widthwise direction thereof; and

pinch an upper edge portion of the band-shaped flexible substrate with at least a pair of upper grip rollers arranged between the plurality of film forming chambers while the band-shaped flexible substrate is being conveyed.

14 . The method according to claim 13 , wherein a plurality of pairs of the upper grip rollers are arranged adjacent to at least one of the film forming chambers for pinching the upper edge portion of the band-shaped flexible substrate.

15 . The method according to claim 13 , wherein the direction of rotation of the pairs of upper grip rollers is inclined obliquely upwardly with respect to the direction in which the band-shaped flexible substrate is conveyed.

16 . The method according to claim 14 , wherein the direction of rotation of the pairs of upper grip rollers is inclined obliquely upwardly with respect to the direction in which the band-shaped flexible substrate is conveyed.

17 . The method according to claim 13 , further including the step of pinching the lower edge portion of the band-shaped flexible substrate with at least one pair of lower grip rollers provided between the plurality of film forming chambers while the band-shaped flexible substrate is being conveyed.

18 . The method according to claim 16 , wherein the direction of rotation of the pairs of lower grip rollers is inclined obliquely downwardly with respect to the direction in which the band-shaped flexible substrate is conveyed.

19 . The method according to claim 17 , wherein the direction of rotation of the pairs of lower grip rollers is inclined obliquely downwardly with respect to the direction in which the band-shaped flexible substrate is conveyed.

20 . The method according to claim 18 , wherein the direction of rotation of the pairs of lower grip rollers is inclined obliquely downwardly with respect to the direction in which the band-shaped flexible substrate is conveyed.