POLARIZER FILMS AND METHODS OF MAKING THE SAME
In general, in one aspect, the invention features an article that includes a layer including a plurality of spaced-apart portions of a first material extending along a first direction. The layer transmits about 20% or more of light of wavelength λ having a first polarization state incident on the layer along a path. The layer transmits about 2% or less of light of wavelength λ having a second polarization state incident on the layer along the path, the first and second polarization states being orthogonal. For wavelength λ, the first material has a refractive index of 1.8 or more and an extinction coefficient of 1.8 or more, and λ is 300 nm or less.
1 . An article, comprising:
a layer including a plurality of spaced-apart portions of a first material extending along a first direction, wherein:
the layer transmits about 20% or more of light of wavelength λ having a first polarization state incident on the layer along a path,
the layer transmits about 2% or less of light of wavelength λ having a second polarization state incident on the layer along the path, the first and second polarization states being orthogonal,
for wavelength λ, the first material has a refractive index of 1.8 or more and an extinction coefficient of 1.8 or more, and
λ is 300 nm or less.
2 . The article of claim 1 , wherein the first material is a metal.
3 . The article of claim 2 , wherein the metal is tungsten, titanium, chromium, nickel, Pt, molybdenum, vanadium, palladium, or iridium.
4 . The article of claim 1 , wherein the first material is a metal oxide.
5 . The article of claim 4 , wherein the metal oxide is titanium dioxide or indium tin oxide.
6 . The article of claim 1 , wherein the first material is a semiconductor material.
7 . The article of claim 6 , wherein the semiconductor material is silicon, germanium, indium phosphide, or SiGe.
8 . The article of claim 1 , wherein the first material is a metal silicide.
9 . The article of claim 1 , wherein the adjacent spaced apart portions are separated by a distance of about 150 nm or less.
10 . The article of claim 1 , wherein the spaced apart portions have a depth of about 50 nm or more.
11 . The article of claim 1 , wherein the spaced apart portions have an aspect ratio of about 1:1 or more.
12 . The article of claim 1 , wherein the spaced apart portions are arranged to form a grating.
13 . The article of claim 12 , wherein the grating has a period of about 200 nm or less.
14 . The article of claim 12 , wherein the grating has a duty cycle of about 60% or less.
15 . The article of claim 12 , wherein the grating has a rectangular, trapezoidal, or triangular cross-sectional profile.
16 . The article of claim 1 , further comprising a plurality of spaced apart portions of a second material extending along the first direction, wherein the first and second materials are different.
17 . The article of claim 16 , wherein the second material is a metal.
18 . The article of claim 17 , wherein the second material is Al, Au, Ag, or Cu.
19 . The article of claim 16 , wherein the second material is a dielectric material.
20 . The article of claim 16 , wherein the second material is an oxide.
21 . The article of claim 16 , wherein each two portions of the first material are disposed on opposing surfaces of a corresponding portion of the second material.
22 . The article of claim 21 , wherein the two portions of the first material form side walls of the corresponding portion of the second material.
23 . The article of claim 22 , wherein portions of the first material that form side walls of adjacent portions of the second material are separated by a gap.
24 . The article of claim 1 , wherein λ is about 260 nm or less.
25 . The article of claim 24 , wherein λ is in a range from about 230 nm to about 260 nm.
26 . The article of claim 1 , the layer transmits about 30% or more of light of wavelength λ having the first polarization state incident on the layer along the path.
27 . The article of claim 1 , wherein the layer transmits about 1% or less of light of wavelength λ having the second polarization state incident on the layer along the path.
28 . The article of claim 1 , wherein the layer has an extinction ration of about 30 or more at λ.
29 . The article of claim 1 , wherein the layer reflects about 20% or less of light of wavelength λ having the second polarization state incident on the layer along the path.
30 . The article of claim 1 , further comprising a second layer including a plurality of spaced-apart portions of a second material extending along the first direction, the second material being different from the first material, wherein:
the second layer transmits about 20% or more of light of wavelength λ having the first polarization state incident on the layer along the path,
the layer transmits about 2% or less of light of wavelength λ having the second polarization state incident on the layer along the path, the first and second polarization states being orthogonal, and λ<λ′.
31 . The article of claim 30 , wherein λ′ is in a range from about 400 nm to about 700 nm.
32 . The article of claim 30 , wherein the first material is a dielectric material and the second material is a metal.
33 . The article of claim 1 , further comprising a substrate supporting the layer.
34 . A system, comprising:
a radiation source; and
the article of claim 1 ,
wherein the radiation source is configured to direct radiation at λ toward the article.
35 . A method, comprising:
using the article of claim 1 to provide polarized radiation at 2; and
directing the polarized radiation to a target.
36 . The method of claim 35 , wherein the target comprises an alignment layer for a liquid crystal display.
37 . An article, comprising:
a layer including a plurality of spaced-apart portions of a first material extending along a first direction, wherein:
the layer transmits about 20% or more of light of wavelength λ having a first polarization state incident on the layer along a path,
the layer transmits about 2% or less of light of wavelength λ having a second polarization state incident on the layer along the path, the first and second polarization states being orthogonal,
the first material is a metal oxide, tungsten, or silicon, and
λ is 300 nm or less.
38 . An article, comprising:
a layer including a plurality of spaced-apart portions of a first material extending along a first direction, wherein:
for a cross-sectional profile through the layer orthogonal to the first direction, adjacent portions have a minimum separation of about 100 nm or less and the portions have a width of about 100 nm or less,
for wavelength λ, the first material has a refractive index of 1.8 or more and an extinction coefficient of 1.8 or more, and
λ is 300 nm or less.
39 . An article, comprising:
a layer including a plurality of spaced-apart portions of a first material extending along a first direction, wherein:
for a cross-sectional profile through the layer orthogonal to the first direction, adjacent portions have a minimum separation of about 100 nr or less and the portions have a width of about 100 nm or less,
the first material is a metal oxide, tungsten, or silicon, and
λ is 300 nm or less.
40 . An article, comprising:
a layer comprising:
a plurality of spaced apart portions of a first material arranged to form a first grating having a first period; and
a plurality of spaced apart portions of a second material arranged to form a second grating having a second period,
wherein the first and second periods are different, one of the first and second materials is a metal, the other of the first and second materials is a dielectric material, and adjacent portions of the first material are separated by two adjacent portions of the second material.