Nitride-based light emitting device and manufacturing method thereof
View Patent ↗A light emitting device according to an exemplary embodiment of the present invention includes: an n-type cladding layer; a p-type cladding layer; an active layer interposed between the n-type cladding layer and the p-type cladding layer; and an ohmic contact layer contacting the p-type cladding layer or the n-type cladding layer and comprising a first film that comprises a transparent conductive zinc oxide having a one-dimensional nano structure, wherein the one-dimensional nano structure is at least one selected from a nano-column, a nano rod, and a nano wire.
1. A method of manufacturing a light emitting device, the method comprising:
forming an n-type cladding layer, an active layer, and a p-type cladding layer on a substrate;
forming a transparent conductive zinc oxide film of an ohmic contact layer, the zinc oxide film having a nano structure; and
heat treating the zinc oxide film.
2. The method of claim 1 , wherein the formation of the zinc oxide film comprising:
depositing a two-dimensional thin film of zinc oxide; and
etching and re-growing the two-dimensional thin film under an atmosphere including a hydrogen gas.
3. The method of claim 1 , wherein the zinc oxide film comprises at least one of aluminum (Al), chromium (Cr), silicon (Si), germanium (Ge), indium (In), lithium (Li), gallium (Ga), magnesium (Mg), zinc (Zn), beryllium (Be), molybdenum (Mo), vanadium (V), copper (Cu), iridium (Ir), rhodium (Rh), ruthenium (Ru), tungsten (W), cobalt (Co), nickel (Ni), manganese (Mn), titanium (Ti), tantalum (Ta), cadmium (Cd), lanthanum (La), and oxides thereof.
4. The method of claim 1 , further comprising:
forming an ohmic interlayer under the zinc oxide film,
wherein the ohmic interlayer comprises at least one of metals including Ni, Pd, Pt, Rh, Zn, In, Sn, Ag, Au, Cd, Mg, Be, Mo, V, Cu, Ti, Ir, Ru, W, Co, Mn, and La, transparent conductive oxides including ITO, SnO 2 , ZnO, In 2 O 3 , Ga 2 O 3 , RhO 2 , NiO, CoO, PdO, PtO, CuAlO 2 , CdO, and CuGaO 2 , and transparent conductive nitrides including TiN, TaN, and SiNx.
5. The method of claim 4 , further comprising:
performing heat treatment after the formation of the ohmic interlayer and before the formation of the zinc oxide film.
6. The method of claim 5 , wherein the heat treatment before the formation of the zinc oxide film is performed at a temperature equal to or lower than about 800° C. and under a vacuum or under an atmosphere of oxygen (O 2 ), nitrogen (N 2 ), argon (Ar), hydrogen (H 2 ), or air.
7. The method of claim 1 , further comprising:
performing plasma treatment on the zinc oxide film by using ions of such as oxygen (O2), nitrogen (N2), hydrogen (H2), or argon (Ar) at a temperature equal to or lower than about 800° C.