Methods for liquid transfer coating of three-dimensional substrates
Methods here disclosed provide for selectively coating the top surfaces or ridges of a 3-D substrate while avoiding liquid coating material wicking into micro cavities on 3-D substrates. The substrate includes holes formed in a three-dimensional substrate by forming a sacrificial layer on a template. The template includes a template substrate with posts and trenches between the posts. The steps include subsequently depositing a semiconductor layer and selectively etching the sacrificial layer. Then, the steps include releasing the semiconductor layer from the template and coating the 3-D substrate using a liquid transfer coating step for applying a liquid coating material to a surface of the 3-D substrate. The method may further include coating the 3-D substrate by selectively coating the top ridges or surfaces of the substrate. Additional features may include filling the micro cavities of the substrate with a filling material, removing the filling material to expose only the substrate surfaces to be coated, coating the substrate with a layer of liquid coating material, and removing said filling material from the micro cavities of the substrate.
1. A method for selectively coating a three-dimensional (3-D) substrate, said substrate comprising a plurality of of three-dimensional features, comprising the steps of:
forming a three-dimensional substrate comprising the steps of:
forming a sacrificial layer on a template, said template comprising a template substrate, said template substrate comprising a plurality of posts and a plurality of trenches between said plurality of posts;
subsequently depositing a semiconductor layer;
selectively etching said sacrificial layer and releasing said semiconductor layer from said template; and
coating the top ridges or surfaces of said 3-D substrate using a liquid transfer coating step for applying a liquid coating material to a predetermined surface of said 3-D substrate, comprising:
maintaining a thin sheet of liquid coating material on a flat surface; comprising:
providing a micromachined plate having restrictive flow holes to restrict the refreshing flow rate of liquid coating material and capable of anchoring a thin sheet of liquid coating material in place;
positioning said micromachined plate on a reservoir of liquid coating material under constant pressure; and
controlling the volume of said thin sheet of liquid coating material according to the transfer of liquid coating material from said liquid coating material reservoir to said thin sheet of liquid coating material on said micromachined plate through said restrictive flow holes;
contacting the substrate surface to be coated with said thin sheet of liquid coating material;
removing the substrate from said thin sheet of liquid coating material; and
curing the coating material on the substrate.
2. The method for selectively coating a 3-D substrate of claim 1 , wherein said step of maintaining a thin sheet of liquid coating material on a flat surface comprises the step of providing a flat surface integrated with an electrostatic chuck.
3. The method for selectively coating a 3-D substrate of claim 2 , wherein said step of contacting the substrate surface to be coated with said thin sheet of liquid coating material comprises the step of conformally clamping said substrate surface to said flat surface by activating said electrostatic chuck.
4. The method for selectively coating a 3-D substrate of claim 3 , wherein said step of maintaining a thin sheet of liquid coating material on a flat surface comprises the step of maintaining said thin sheet at a thickness in the range of 5 to 50 nanometers.
5. The method for selectively coating a 3-D substrate of claim 1 , wherein said step of maintaining a thin sheet of liquid coating material on a flat surface comprises the step of measuring and controlling the thickness of said thin sheet of liquid coating material with a liquid level sensor.
6. The method for selectively coating a 3-D substrate of claim 1 , wherein said step of maintaining a thin sheet of liquid coating material on a flat surface further comprises partially curing the coating material on the flat surface.
7. The method for selectively coating a 3-D substrate of claim 1 , wherein said step of maintaining a thin sheet of liquid coating material on a flat surface further comprises optionally pre-heat the 3-D substrate prior to the coating.
8. A method for selectively coating a three-dimensional(3-D) substrate, said substrate comprising a plurality of three-dimensional features, comprising the steps of:
forming a three-dimensional substrate comprising the steps of:
forming a sacrificial layer on a template, said template comprising a template substrate, said template substrate comprising a plurality of posts and a plurality of trenches between said plurality of posts;
subsequently depositing a semiconductor layer;
selectively etching said sacrificial layer and releasing said semiconductor layer from said template; and
coating the top ridges or surfaces of said 3-D substrate using a liquid transfer coating step for applying a liquid coating material to a predetermined surface of said 3-D substrate, comprising:
providing a reservoir of a liquid coating material associated with a nozzle, said nozzle having an opening capable of preventing said liquid coating material from flowing out; and
contacting the substrate surface to be coated with the meniscus of liquid coating material at said nozzle.
9. The method for selectively coating a 3-D substrate of claim 8 , wherein said step of providing a reservoir of a liquid coating material associated with a nozzle comprises the step of controlling said liquid coating material in said reservoir at a specified temperature.
10. The method for selectively coating a 3-D substrate of claim 8 , wherein said step of contacting the substrate surface to be coated with the meniscus of liquid coating material at said nozzle comprises the step of locally drying said liquid coating material according to an air or gas flow or according to a heating or UV curing device.