Semiconductor laser device and method for manufacturing the same
View Patent ↗A semiconductor laser device including a submount having a front surface and a back surface corresponding to the opposing face that are in parallel with each other and a visible light transmittance of 60% or more; a connection electrode that is formed on the front surface; and a semiconductor laser element that is packaged on the submount through the connection electrode, and is allowed to emit a laser beam in a direction parallel to the front surface.
1. A semiconductor laser device comprising:
a submount having a front surface and a back surface corresponding to the opposing face that are in parallel with each other and a visible light transmittance of 60% or more;
a connection electrode that is formed on the front surface; and
a semiconductor laser element that is packaged on the submount through the connection electrode, and is allowed to emit a laser beam in a direction parallel to the front surface, wherein each of the front surface and the back surface of the submount is allowed to have a ten-point average roughness Rz of 1 μm or less, defined by JIS B0106-1994, and wherein
the semiconductor laser element includes a semiconductor substrate, a light emitting unit formed on a front surface of the semiconductor substrate, a first electrode formed on a surface of the light emitting unit and a second electrode formed on a back surface of the semiconductor substrate, so that the first electrode of the semiconductor laser element is electrically connected to the connection electrode on the submount through a solder material.
2. The semiconductor laser device according to claim 1 , wherein, in the semiconductor laser element, a plurality of the light emitting units are formed on the front surface of the semiconductor substrate in the form of stripes, while being electrically separated from one another, with the first electrode being formed on each of the surfaces of the light emitting units, and a plurality of the connection electrodes are formed on the surface of the submount in the form of stripes.
3. The semiconductor laser device according to claim 2 , wherein the semiconductor laser element is allowed to emit a plurality of laser beams having different oscillating wavelengths or the same oscillating wavelength.
4. The semiconductor laser device according to claim 2 , wherein the semiconductor laser element has a light emission-point interval of 50 μm or less.
5. The semiconductor laser device according to claim 1 , wherein the submount is made from at least one material selected from the group consisting of GaN, sapphire and SiO 2 .