Crucible heating apparatus and deposition apparatus including the same
A crucible heating apparatus and a deposition apparatus including the same. The crucible heating apparatus includes: a crucible including a main body to house a deposition material, and a cover disposed on the main body, having a nozzle; a band coupled to the crucible, through contact parts; a thermocouple coupled to the band; a housing to house the crucible and the band; and a heater disposed inside the housing, to heat the deposition material.
1. A crucible heating apparatus comprising:
a crucible comprising,
a main body to house a deposition material, and
a cover disposed on the main body, having a nozzle;
a band to insertingly couple with a lower side of a side surface of the crucible, having flexible contact parts to contact the lower side of a side surface of the crucible;
a thermocouple having a first terminal that is connected to the band;
a housing to house the crucible and the band, having an opening; and
a heater disposed inside the housing, to heat the deposition material.
2. The crucible heating apparatus according to claim 1 , wherein the thermocouple is connected to a part of the band that is adjacent to the bottom of the housing.
3. The crucible heating apparatus according to claim 1 , further comprising a temperature controller connected to a second terminal of the thermocouple.
4. The crucible heating apparatus according to claim 1 , wherein the band and the contact parts are formed of the same material.
5. The crucible heating apparatus according to claim 1 , wherein the band and the contact parts are formed of steel use stainless (SUS).
6. The crucible heating apparatus according to claim 1 , wherein the contact parts are bent from an upper part of the band.
7. The crucible heating apparatus according to claim 1 , wherein the heater surrounds the crucible.
8. The crucible heating apparatus according to claim 1 , wherein the thermocouple is insulated from the heater.
9. A deposition apparatus comprising:
a chamber;
a pattern mask disposed in an upper part of the chamber; and
a crucible heating apparatus comprising,
a crucible comprising a main body to house a deposition material, and a cover disposed on the main body, having a nozzle,
a band to insertingly couple with a lower side of a side surface of the crucible, having flexible contact parts that contact the lower side of a side surface of the crucible,
a thermocouple having a first terminal connected to the band,
a housing to house the crucible and the band, having an open upper part, and
a heater disposed inside the housing, to heat the deposition material.
10. The deposition apparatus according to claim 9 , wherein the thermocouple is connected to a part of the band that is adjacent to the bottom of the housing.
11. The deposition apparatus according to claim 9 , further comprising a temperature controller connected to a second terminal of the thermocouple.
12. The deposition apparatus according to claim 9 , wherein the band and the contact parts are formed of the same material.
13. The deposition apparatus according to claim 9 , wherein the band and the contact parts are formed of steel use stainless (SUS).
14. The deposition apparatus according to claim 9 , wherein the contact parts are bent from an upper part of the band.
15. The deposition apparatus according to claim 9 , wherein the heater surrounds the crucible.
16. The deposition apparatus according to claim 9 , wherein the thermocouple is insulated from the heater.
17. A heating apparatus to heat a crucible, comprising:
a body;
a band to insertingly couple with a lower side of a side surface of the crucible, having flexible contact parts that are bent to contact the lower side of a side surface of the crucible;
a thermocouple having a first terminal that is connected to the band; and
a heater disposed inside the body, to heat the crucible.
18. The heating apparatus of claim 17 , wherein the contact parts are trapezoidal, semicircular, triangular, or rectangular.
19. The heating apparatus of claim 17 , wherein the contact parts are divided by cuts formed in the band.
20. The heating apparatus of claim 17 , further comprising a temperature controller connected to a second terminal of the thermocouple.