Evaporation apparatus, method of manufacturing anode using same, and method of manufacturing battery using same
View Patent ↗An evaporation apparatus that is capable of stably forming a good quality thin film and is highly suitable for mass production is provided. The evaporation apparatus include an evaporation source discharging an evaporation material by heating, a retention member retaining an evaporation object, and a heat shield member that is located between the evaporation source and the evaporation object retained by the retention member, has an opening for passing the evaporation material in a state of vapor phase from the evaporation source to the evaporation object, and shields the evaporation object from part of radiation heat of the evaporation source. The heat shield member is located closer to the evaporation source than to the retention member.
1. A method of manufacturing an anode in which an active material layer is provided on a current collector, comprising:
retaining the current collector in a location where the current collector is sequentially opposed to two evaporation sources in series discharging active materials by heating; and
forming the active material layer by sublimating the active materials from the evaporation sources after arranging a heat shield member including two openings each in a location closer to one of the evaporation sources than to the current collector between the evaporation sources and the current collector, the evaporation sources being separated in two chambers that are separated from one another by a wall that intersects the heat shield member, and depositing the active materials in a vapor phase passing through the openings on the current collector while blocking part of radiation heat of the evaporation sources by the heat shield member.
2. The method of manufacturing an anode according to claim 1 , wherein,
each evaporation source in which the active material is contained in a depressed portion of a container is used, and
the heat shield member is arranged so that the entire container is concealed from the current collector.
3. The method of manufacturing an anode according to claim 1 , wherein the active material is evaporated while the current collector runs by making a rotating body retain the current collector and rotating the rotating body.
4. The method of manufacturing an anode according to claim 1 , wherein copper (Cu) is used as the current collector, and silicon (Si) is used as a main element of the active material.
5. A method of manufacturing a battery comprising:
respectively forming a cathode and an anode; and
containing a laminated structure including the cathode, the anode, and a separator sandwiched between the cathode and the anode into a package member together with an electrolyte, wherein,
the forming the anode includes:
retaining a current collector in a location where the current collector is sequentially opposed to two evaporation sources in series discharging active materials by heating; and
forming an active material layer by sublimating the active materials from the evaporation sources after arranging a heat shield member including two openings each in a location closer to one of the evaporation sources than to the current collector between the evaporation sources and the current collector, the evaporation sources being separated in two chambers that are separated from one another by a wall that intersects the heat shield member, and depositing the active materials in a vapor phase passing through the openings on the current collector while blocking part of radiation heat of the evaporation sources by the heat shield member.
6. The method of manufacturing an anode according to claim 1 , wherein, the forming the active material layer includes running the current collector past the openings in both forward and reverse directions while depositing the active materials.
7. The method of manufacturing a battery according to claim 5 , wherein, the forming the active material layer includes running the current collector past the openings in both forward and reverse directions while depositing the active materials.
8. The method of manufacturing an anode according to claim 1 , wherein, the forming the active material layer includes sublimating the active materials from the evaporation sources that are separated in two chambers, the two chambers being separated from one another by the wall that intersects the heat shield member, where the wall is a vertical wall.
9. The method of manufacturing a battery according to claim 5 , wherein, the forming the active material layer includes sublimating the active materials from the evaporation sources that are separated in two chambers, the two chambers being separated from one another by the wall that intersects the heat shield member, where the wall is a vertical wall.
10. The method of manufacturing an anode according to claim 1 , wherein, the forming the active material layer includes arranging the heat shield member so that each opening includes a cross sectional area smaller than a cross sectional area of active material in one of the evaporation sources.
11. The method of manufacturing a battery according to claim 5 , wherein, the forming the active material layer includes arranging the heat shield member so that each opening includes a cross sectional area smaller than a cross sectional area of active material in one of the evaporation sources.