Electro-optic integrated circuits and methods for the production thereof
View Patent ↗An electro-optic integrated circuit including an integrated circuit substrate at least one optical signal providing element and at least one discrete reflecting optical element mounted onto the integrated circuit substrate, cooperating with the at least one optical signal providing element and being operative to direct light from the at least one optical signal providing element. An electro-optic integrated circuit including an integrated circuit substrate, at least one optical signal receiving element and at least one discrete reflecting optical element mounted onto the integrated circuit substrate and cooperating with the at least one optical signal receiving element and being operative to direct light to the at least one optical signal receiving element.
1. A method of fabricating an optoelectronic circuit, comprising:
forming a plurality of optical fiber positioning elements on a first surface of a semiconductor substrate;
wherein the plurality of optical fiber positioning elements are physically configured to position an array of optical fibers;
forming a first plurality of notches substantially perpendicular to the plurality of optical fiber positioning elements, the first plurality of notches, each notch having an inclined surface;
forming a mirror assembly by forming a plurality of microlenses on a first surface of a glass substrate, depositing a layer of metal over the plurality of microlenses and the glass substrate, and dicing the glass substrate to form individual mirror assemblies; and
mounting the mirror assembly on the inclined surface of the notch.
2. The method of claim 1 , further comprising, mounting a plurality of optical fibers in the plurality of optical fiber positioning elements forming the array of optical fibers, each optical fiber of the array of optical fibers having a core region.
3. The method of claim 1 , wherein, each of the first plurality of notches extends through the core region of at least one optical fiber of the array of optical fibers.
4. The method of claim 1 , wherein the mounting the mirror assembly comprises:
depositing optical adhesive between the mirror assembly and the inclined surface; wherein the optical adhesive has a refractive index that is substantially similar to that of the core region of each optical fiber; and
depositing adhesive within the notch.
5. The method of claim 1 , wherein, the glass substrate is substantially within a thickness range of 200-400 micrometers.
6. The method of claim 1 , wherein each of the microlens has a refractive index substantially same or similar to that of the glass substrate.
7. The method of claim 1 , wherein the layer of metal is deposited via sputtering or evaporation.
8. The method of claim 1 , wherein, the layer of metal comprises substantially of aluminum.
9. The method of claim 1 , further comprising,
depositing an additional layer of metal over a second surface of the glass substrate; and
patterning the additional layer of metal.
10. The method of claim 9 , wherein each individual mirror assembly comprises: a pair of microlenses and a flat reflective surface.
11. The method of claim 1 , further comprising, forming gratings on the first surface or the second surface of the glass substrate.
12. The method of claim 11 , wherein the gratings are formed by etching.
13. The method of claim 12 , wherein each individual mirror assembly further comprises: a reflective grating.
14. The method of claim 1 , wherein each individual mirror assembly comprises: at least one curved portion.
15. The method of claim 1 , further comprising, forming a second plurality of elongated notches substantially parallel to the plurality of optical fiber positioning elements on the first surface.
16. The method of claim 15 , further comprising, placing a set of cylindrical elements in the second plurality of elongated notches.
17. The method of claim 15 , further comprising, forming an optical connector on a diced edge of each individual mirror assembly.
18. The method of claim 1 , wherein, the substrate having a second surface with an electrical circuit formed thereon.
19. The method of claim 18 , further comprising, forming a plurality of electrical contacts on the electrical circuit on the second surface of the substrate.
20. The method of claim 19 , wherein the plurality of electrical contacts comprises gold studs.
21. The method of claim 19 , further comprising, coupling an integrated circuit to the electrical circuit via the plurality of electrical contacts.
22. The method of claim 21 , wherein, the integrated circuit comprises electro-optic devices.
23. The method of claim 21 , further comprising, depositing an encapsulation layer over the integrated circuit and the electrical circuit.
24. The method of claim 23 , wherein, the encapsulation layer comprises solder mask.
25. A method for forming a mirror assembly, comprising:
forming a plurality of microlenses on a first surface of a glass substrate;
depositing a layer of metal over the plurality of microlenses and the glass substrate; and
dicing the glass substrate to form individual mirror assemblies.
26. The method of claim 25 , wherein, the glass substrate is substantially within a thickness range of 200-400 micrometers.
27. The method of claim 25 , wherein each of the microlens has a refractive index substantially same or similar to that of the glass substrate.
28. The method of claim 25 , wherein the layer of metal is deposited via sputtering or evaporation.
29. The method of claim 25 , wherein, the layer of metal comprises substantially of aluminum.
30. The method of claim 25 , further comprising,
depositing an additional layer of metal over a second surface of the glass substrate; and
patterning the additional layer of metal.
31. The method of claim 25 , further comprising, forming gratings on the first surface or the second surface of the glass substrate.