Granted Patent B1

US 8,166,631 · App. 12/199,624 · Granted May 1, 2012

Abstract

Claims (74)

1. A method for fabricating a magnetic transducer having an underlayer and a nonmagnetic layer residing on the underlayer, the method comprising:

providing a plurality of trenches in the nonmagnetic layer before a main pole is formed, a first trench of the plurality of trenches corresponding to the main pole, at least one side trench of the plurality of trenches corresponding to at least one side shield;

providing a mask covering the at least one side trench;

providing the main pole, at least a portion of the main pole residing in the first trench;

removing at least a portion of the nonmagnetic layer residing between the at least one side trench and the main pole; and

providing at least one side shield, the at least one side shield extending from at least an air-bearing surface (ABS) location to not further than a coil front location.

2. The method of claim 1 wherein the step of removing the at least the portion of the nonmagnetic layer further includes:

wet etching the at least the portion of the nonmagnetic layer.

3. The method of claim 1 wherein the step of providing the main pole further includes:

providing at least one nonmagnetic layer, a first portion of the at least one nonmagnetic layer residing in the first trench, a second portion of the at least one nonmagnetic layer residing on the mask:

providing at least one magnetic layer on the at least one nonmagnetic layer; and planarizing at least the at least one magnetic layer.

4. The method of claim 1 wherein the step of providing the main pole further includes:

providing at least one bevel on the main pole.

5. The method of claim 4 wherein the at least one bevel includes at least one of a top bevel and a bottom bevel.

6. The method of claim 1 further comprising:

removing the mask prior to formation of the at least one side shield.

7. The method of claim 6 wherein the step of providing the at least one side shield further includes:

providing a side shield mask, the side shield mask extending from at least the coil front location distal from the ABS location;

depositing at least one side shield material; and

planarizing the at least one side shield material,

thereby removing a portion of the at least one side shield material.

8. The method of claim 7 wherein the step of providing the at least one side shield further includes:

depositing a planarization stop layer before the at least one side shield material is deposited; and

removing an exposed portion of the planarization stop layer after the step of planarizing the at least one side shield material.

9. The method of claim 1 further comprising:

providing a write gap, at least a portion of the write gap residing on the main pole; and

providing a top shield, at least a portion of the top shield residing on the main pole.

10. The method of claim 1 wherein the plurality of trenches are formed substantially simultaneously.

11. A method for fabricating a magnetic transducer having an underlayer and a nonmagnetic layer residing on the underlayer, the method comprising:

providing a plurality of trenches in the nonmagnetic layer, a first trench of the plurality of trenches corresponding to a main pole, at least one side trench of the plurality of trenches corresponding to at least one side shield;

providing a mask covering the at least one side trench;

providing the main pole, at least a portion of the main pole residing in the first trench, the step of providing the main pole further including

providing at least one nonmagnetic layer, a first portion of the at least one nonmagnetic layer residing in the first trench, a second portion of the at least one nonmagnetic layer residing on the mask:

providing at least one magnetic layer on the at least one nonmagnetic layer, wherein the step of providing the at least one nonmagnetic layer further includes

depositing a planarization stop layer, a first portion of the planarization stop layer residing in the first trench, a second portion of the planarization stop layer residing on the mask; and

depositing a nonmagnetic track width adjustment layer on the planarization stop layer; and

planarizing the at least one magnetic layer

removing at least a portion of the nonmagnetic layer residing between the at least one side trench and the main pole; and

providing at least one side shield, the at least one side shield extending from at least an air-bearing surface (ABS) location to not further than a coil front location.

12. A method for fabricating a magnetic transducer having an underlayer and a nonmagnetic layer residing on the underlayer, the method comprising:

providing a plurality of trenches in the nonmagnetic layer, a first trench of the plurality of trenches corresponding to a main pole, at least one side trench of the plurality of trenches corresponding to at least one side shield;

providing a mask covering the at least one side trench;

providing the main pole, at least a portion of the main pole residing in the first trench, the step of providing the main pole further including

providing at least one nonmagnetic layer, a first portion of the at least one nonmagnetic layer residing in the first trench, a second portion of the at least one nonmagnetic layer residing on the mask, wherein the step of providing the at least one nonmagnetic layer further includes:

depositing a nonmagnetic track width adjustment layer:

providing at least one magnetic layer on the at least one nonmagnetic layer;

removing at least a portion of the nonmagnetic layer residing between the at least one side trench and the main pole; and

providing at least one side shield, the at least one side shield extending from at least an air-bearing surface (ABS) location to not further than a coil front location.

13. A method for fabricating a magnetic transducer having an underlayer and a nonmagnetic layer residing on the underlayer, the method comprising:

providing a plurality of trenches in the nonmagnetic layer, a first trench of the plurality of trenches corresponding to a main pole, at least one side trench of the plurality of trenches corresponding to at least one side shield;

providing a mask covering the at least one side trench;

providing the main pole, at least a portion of the main pole residing in the first trench;

removing at least a portion of the nonmagnetic layer residing between the at least one side trench and the main pole;

removing the mask prior to formation of the at least one side shield; and

providing at least one side shield, the at least one side shield extending from at least an air-bearing surface (ABS) location to not further than a coil front location, the step of providing the at least one side shield further including

providing a side shield mask, the side shield mask extending from at least the coil front location distal from the ABS location, wherein the side shield mask has an edge proximate to the main pole and a rear edge distal from the ABS, and wherein the step of providing the side shield mask further includes:

forming at least one canted corner between the edge and the rear edge such that the at least one side shield includes the at least one canted corner between a side edge proximate to the main pole and a side shield rear edge;

depositing at least one side shield material; and

planarizing the at least one side shield material, thereby removing a portion of the at least one side shield material.

14. A method for fabricating a magnetic transducer having an underlayer and a nonmagnetic layer residing on the underlayer, the method comprising:

providing a plurality of trenches in the nonmagnetic layer, a first trench of the plurality of trenches corresponding to a main pole, at least one side trench of the plurality of trenches corresponding to a side shield, the plurality of trenches being provided before the main pole is provided;

providing a mask before the main pole is provided, at least a portion of the mask covering the at least one side trench;

providing the main pole, at least a portion of the main pole residing in the first trench;

removing a portion of the nonmagnetic layer residing between the at least one side trench and the main pole;

removing the at least the portion of the mask;

providing a planarization stop layer;

providing a side shield mask, the side shield mask extending from at least a coil front location distal from an air-bearing surface (ABS) location;

depositing at least one side shield material; and

planarizing the at least one side shield material.

15. The method of claim 14 wherein the step of providing the main pole further includes:

depositing at least one nonmagnetic layer, a portion of the at least one nonmagnetic layer residing in the first trench;

depositing a main pole layer, at least a portion of the main pole layer residing in the first trench; and

planarizing the main pole layer to form the main pole.

16. The method of claim 14 wherein the plurality of trenches are formed substantially simultaneously.

Assignments (9)