Semiconductor device
View Patent ↗The present invention proposes a dummy metal fill structure which makes it possible to reduce variations in transistor characteristics as much as possible even if mask misalignment occurs, as well as to ensure the intended planarizing effect of the metal CMP process. The dummy metal fill formed above the gate electrode extends in the gate length direction with both ends thereof protruding from a region corresponding to the gate electrode. Even if a mask for forming a wiring layer is misaligned and the position of the dummy metal fill is misaligned from an intended position, the shape of the dummy metal fill within a region of the gate electrode is kept symmetric with respect to the center of the gate electrode.
1. A semiconductor device comprising:
a semiconductor substrate;
a MOS transistor formed on the semiconductor substrate including first and second main electrode regions as a source and a drain and a gate electrode for controlling a current flowing between the source and the drain; and
a dummy metal fill inserted in a wiring layer formed above the MOS transistor so that the dummy metal fill is located above the gate electrode,
wherein the dummy metal fill extends in a gate length direction with both ends thereof protruding from a region corresponding to the gate electrode, and
wherein a plurality of the dummy metal fills are arranged in a gate width direction in a stripe pattern.
2. The semiconductor device of claim 1 , further comprising
first and second metal electrodes included in the wiring layer and electrically connected to the first and second main electrode regions, respectively, wherein
the dummy metal fill is spaced from the first and second metal electrodes and overlaps with at least one of the first and second metal electrodes in the gate length direction.
3. The semiconductor device of claim 1 , wherein the dummy metal fill is formed on a top surface of an interlayer insulating film covering the MOS transistor.
4. The semiconductor device of claim 1 , wherein the dummy metal fill is buried in a groove formed in a top surface of an interlayer insulating film covering the MOS transistor.
5. The semiconductor device of claim 1 , wherein the MOS transistor is a transistor used to provide a differential pair or a current mirror pair in an analog circuit.