Piezoelectric device and method for manufacturing the same
View Patent ↗A piezoelectric device includes: a lower substrate; an upper substrate; an intermediate substrate sandwiched between the lower substrate and the upper substrate, the intermediate substrate including: a piezoelectric vibrating portion; a frame surrounding a periphery of the piezoelectric vibrating portion; a connecting portion coupling the piezoelectric vibrating portion and the frame; a first exciting electrode disposed on an upper surface of the piezoelectric vibrating portion; a second exciting electrode disposed on a lower surface of the piezoelectric vibrating portion; a first wiring line electrically coupled to the first exciting electrode; and a second wiring line electrically coupled to the second exciting electrode; and an inside surface coupling an upper surface and a lower surface of the frame and having a slanted surface having an interior angle with respect to one of the upper surface and the lower surface, the angle being 90 degrees or more. In the oscillator, one of the first wiring line and the second wiring line is disposed to a surface of the slanted surface.
1. A piezoelectric device, comprising:
a lower substrate;
an upper substrate;
an intermediate substrate sandwiched between the lower substrate and the upper substrate, the intermediate substrate including:
a piezoelectric vibrating portion;
a frame surrounding a periphery of the piezoelectric vibrating portion;
a connecting portion coupling the piezoelectric vibrating portion and the frame;
a first exciting electrode disposed on an upper surface of the piezoelectric vibrating portion;
a second exciting electrode disposed on a lower surface of the piezoelectric vibrating portion;
a first wiring line electrically coupled to the first exciting electrode; and
a second wiring line electrically coupled to the second exciting electrode; and
an inside surface coupling an upper surface and a lower surface of the frame and having a slanted surface having an interior angle with respect to one of the upper surface and the lower surface, the angle being more than 90 degrees, one of the first wiring line and the second wiring line being disposed to a surface of the slanted surface.
2. The piezoelectric device according to claim 1 , the frame having a first recess that is disposed to the lower surface and communicates from an inside to an outside of the frame, the first wiring line extending in the first recess.
3. The piezoelectric device according to claim 2 , the frame having a second recess that is disposed to the lower surface so as to face the first recess and communicates from the inside to the outside of the frame, the second wiring line extending in the second recess.
4. The piezoelectric device according to claim 1 , the first slanted surface being formed in two steps, the first wiring line being formed both to the steps of the slanted surface.
5. The piezoelectric device according to claim 1 , the inside surface of the frame having a first slanted surface having a first interior angle with respect to the upper surface of the frame, the first interior angle being more than 90 degrees, and a second slanted surface having a second interior angle with respect to the lower surface of the frame, the second interior angle being more than 90 degrees, the first wiring line extending both to the first slanted surface and the second slanted surface.