Sensor thin film transistor, thin film transistor substrate having the same, and method of manufacturing the same
View Patent ↗A sensor thin film transistor includes a gate electrode, a gate insulation layer formed on the gate electrode, a semiconductor layer having a portion positioned above the gate electrode and on a side of the gate insulation layer opposite the gate electrode, and a source electrode and drain electrode having spaced apart ends positioned on the semiconductor layer, wherein the sensor thin film transistor is operative such that a signal-to-noise ratio is equal to or greater than about 200 when the gate-off voltage applied to the gate electrode is equal to or less than about 0V.
1. A method of manufacturing a thin film transistor substrate, comprising:
forming a first metal pattern group on a substrate, the first metal pattern group including a driving gate electrode and a sensor gate electrode;
forming at a predetermined temperature a semiconductor layer on the first metal pattern group;
forming a second metal pattern group on the semiconductor layer, the second metal pattern group including a driving source electrode, a driving drain electrode, a sensor drain electrode, and a sensor source electrode;
forming a protective layer having a contact hole on the second metal pattern group; and
forming a pixel electrode on the protective layer;
wherein the semiconductor layer is formed at a temperature of about 100° C. to about 180° C.
2. The method of claim 1 , wherein the forming the semiconductor layer is formed at a temperature of about 125° C. to about 135° C.
3. The method of claim 2 , wherein a sensor thin film transistor comprises the sensor gate electrode, the sensor source electrode and the sensor drain electrode.
4. The method of claim 3 , wherein the sensory thin film transistor has a signal-to-noise ratio equal to or greater than about 200 when a gate-off voltage applied to the sensor gate electrode is equal to or less than about 0V.
5. The method of claim 1 , further comprising forming a gate insulation layer on the first metal pattern group at a temperature of about 100° C.
6. The method of claim 5 , wherein the gate insulation layer being formed at a temperature of about 125° C. to about 135° C.