Negative photosensitive fluorinated aromatic resin composition
View Patent ↗To provide a negative photosensitive fluorinated aromatic resin composition having a low relative permittivity, low water absorptivity, high heat resistance and high productivity. A negative photosensitive fluorinated aromatic resin composition comprising the following fluorinated aromatic prepolymer, a photosensitizer and a solvent. Here the fluorinated aromatic prepolymer is a fluorinated aromatic prepolymer which is obtained by subjecting either one or both of a compound (Y-1) having a crosslinkable functional group (A) and a phenolic hydroxyl group, and a compound (Y-2) having a crosslinkable functional group (A) and a fluorinated aromatic ring, to a condensation reaction in the presence of a HF-removing agent, with a fluorinated aromatic compound (B) represented by the following formula (1): (wherein n is an integer of from 0 to 3, each of a and b which are independent of each other, is an integer of from 0 to 3, each of Rf 1 and Rf 2 is a fluorinated alkyl group having at most 8 carbon atoms, and F in the aromatic ring represents that hydrogen atoms of the aromatic ring are all substituted by fluorine atoms), and a compound (C) having at least 3 phenolic hydroxyl groups, and which has crosslinkable functional groups (A) and ether bonds and has a number average molecular weight of from 1×10 3 to 5×10 5 .
1. A fluorinated aromatic resin film having a concavo-convex shape, which is obtained by coating a substrate with a negative photosensitive fluorinated aromatic resin composition to form a negative photosensitive fluorinated aromatic resin composition film, followed by exposure and development,
wherein the negative photosensitive fluorinated aromatic resin composition comprises the following fluorinated aromatic prepolymer, at least one photosensitizer and at least one solvent,
wherein the fluorinated aromatic prepolymer is obtained by subjecting either one or both of a compound (Y-1) having a crosslinkable functional group (A) and a phenolic hydroxyl group, and a compound (Y-2) having a crosslinkable functional group (A) and a fluorinated aromatic ring, to a condensation reaction in the presence of a HF-removing agent, with a fluorinated aromatic compound (B) represented by the following formula (1):
wherein n is an integer of from 0 to 3, each of a and b which are independent of each other, is an integer of from 0 to 3, each of Rf 1 and Rf 2 which may be the same or different from each other, is a fluorinated alkyl group having at most 8 carbon atoms, and F in the aromatic ring represents that hydrogen atoms of the aromatic ring are all substituted by fluorine atoms,
and a compound (C) having at least 3 phenolic hydroxyl groups, and which has crosslinkable functional groups (A) and ether bonds and has a number average molecular weight of from 1×10 3 to 5×10 5 .
2. The fluorinated aromatic resin film of claim 1 , wherein the photosensitizer is contained in an amount of from 0.1 to 30 parts by mass, based on 100 parts by mass of the fluorinated aromatic prepolymer.
3. The fluorinated aromatic resin film of claim 1 , wherein the photosensitizer is a photo initiator, a photoacid generator, a photobase generator or a photocrosslinking agent.
4. The fluorinated aromatic resin film of claim 1 , wherein the solvent is at least one member selected from the group consisting of an aromatic hydrocarbon, a dipolar aprotic solvent, a ketone, an ester, an ether or a halogenated hydrocarbon.
5. The fluorinated aromatic resin film of claim 1 , wherein the HF-removing agent is sodium carbonate, potassium carbonate, sodium hydrogencarbonate, potassium hydrogencarbonate, sodium hydroxide or potassium hydroxide.
6. The fluorinated aromatic resin film of claim 1 , wherein the compound (Y-1) or the compound (Y-2) is a phenol having a reactive double bond or triple bond, or a fluorinated aryl having a reactive double bond or triple bond.
7. The fluorinated aromatic resin film of claim 1 , wherein the fluorinated aromatic compound (B) is perfluorotoluene, perfluorobiphenyl, perfluoro(1,3,5-triphenylbenzene) or perfluoro(1,2,4-triphenylbenzene).
8. The fluorinated aromatic resin film of claim 1 , wherein the compound (C) is trihydroxybenzene or 1,1,1-tris(4-hydroxyphenyl)ethane.
9. The fluorinated aromatic resin film of claim 1 , wherein the negative photosensitive fluorinated aromatic resin composition film has a thickness of from about 0.01 to 500 μm.
10. The fluorinated aromatic resin film of claim 1 , wherein the negative photosensitive fluorinated aromatic resin composition film has a thickness of from about 0.1 to 300 μm.
11. An electric component, electronic component or optical component comprising the fluorinated aromatic resin film of claim 1 .
12. A method of making the fluorinated aromatic resin film of claim 1 , comprising coating the substrate with the negative photosensitive fluorinated aromatic resin composition to form a negative photosensitive fluorinated aromatic resin composition film, followed by exposure and development.