Light-emitting device with enhanced luminous efficiency and method of producing the same
View Patent ↗A light-emitting device comprises first and second dot members. The first dot member is formed so that it makes contact with the second dot member. The first dot member comprises a plurality of first quantum dot layers. Each of the plurality of first quantum dot layers comprises a plurality of first quantum dots and a silicon dioxide film. The first quantum dot comprises an n-type silicon dot. The second dot member comprises a plurality of second quantum dot layers. Each of the plurality of second quantum dot layers comprises a plurality of second quantum dots and a silicon dioxide film. The second quantum dot comprises a p-type silicon dot.
1. A luminous element comprising:
a first dot member including first quantum dots of a first conductivity type; and
a second dot member disposed in contact with the first dot member and including second quantum dots of a second conductivity type different from the first conductivity type; wherein
the first dot member includes
the first quantum dots and
a first insulating layer covering the first quantum dots;
the second dot member includes
the second quantum dots and
a second insulating layer covering the second quantum dots; and
the first and second quantum dots include metal silicide dots.
2. The luminous element according to claim 1 further comprising a substrate being in contact with the first dot member and having the first conductivity type, wherein
the second dot member is disposed on the first dot member.
3. The luminous element according to claim 2 , wherein the first conductivity type is p-type and the second conductivity type is n-type.
4. The luminous element according to claim 2 , wherein the first conductivity type is n-type and the second conductivity type is p-type.
5. A method of manufacturing a luminous element comprising:
a first step of depositing a first dot member including first quantum dots of a first conductivity type on a main surface of a semiconductor substrate of the first conductivity type; and
a second step of depositing a second dot member including second quantum dots of a second conductivity type on the first dot member, the second conductivity type being different from the first conductivity type; wherein
the first step includes
a first sub-step of supplying, to a reaction chamber, a first material gas to deposit intrinsic third quantum dots and
a second sub-step of supplying, to the reaction chamber, a first impurity gas in addition to the first material gas;
the second step includes
a third sub-step of supplying, to the reaction chamber, a second material gas to deposit intrinsic fourth quantum dots and
a fourth sub-step of supplying, to the reaction chamber, a second impurity gas in addition to the second material gas;
the first dot member includes
the first quantum dots and
a first insulating layer covering the first quantum dots; and
the second dot member includes
the second quantum dots and
a second insulating layer covering the second quantum dots.
6. The method of manufacturing a luminous element according to claim 5 , wherein
in the first sub-step, the first material gas is supplied to the reaction chamber from a first timing to a second timing;
in the second sub-step, the first impurity gas is supplied, in addition to the first material gas, to the reaction chamber from a third timing to the second timing, the third timing being between the first timing and the second timing;
in the third sub-step, the second material gas is supplied, in addition to the second material gas, to the reaction chamber from a fourth timing to a fifth timing; and
in the fourth sub-step, the second impurity gas is supplied to the reaction chamber from a sixth timing to the fourth timing, the sixth timing being between the fourth timing and the fifth timing.
7. The method of manufacturing a luminous element according to claim 6 , wherein
the third timing is after the midpoint between the first timing and the second timing; and
the sixth timing is after the midpoint between the fourth timing and the fifth timing.
8. The method of manufacturing a luminous element according to claim 7 , wherein the first material gas is the same as the second material gas.
9. The method of manufacturing a luminous element according to claim 8 , wherein
in the first sub-step, a silane gas is supplied to the reaction chamber;
in the second sub-step, a phosphine gas is supplied to the reaction chamber in addition to the silane gas;
in the third sub-step, a silane gas is supplied to the reaction chamber; and
in the fourth sub-step, a diborane gas is supplied to the reaction chamber in addition to the silane gas.
10. The method of manufacturing a luminous element according to claim 8 , wherein
in the first sub-step, a silane gas is supplied to the reaction chamber;
in the second sub-step, a diborane gas is supplied to the reaction chamber in addition to the silane gas;
in the third sub-step, a silane gas is supplied to the reaction chamber; and
in the fourth sub-step, a phosphine gas is supplied to the reaction chamber in addition to the silane gas.
11. The method of manufacturing a luminous element according to claim 7 , wherein
the time length from the first timing to the second timing is substantially equal to that from the fourth timing to the fifth timing.