Method for producing a semiconductor device using a solder alloy
View Patent ↗In producing a semiconductor device, a solder alloy is prepared to contain antimony in a range of from 3 to 5 wt %, a trace amount of germanium, and a balance of tin. An insulative substrate having conductor patterns on both surfaces thereof is prepared, and a heat sink plate is mounted on a back surface of the insulative substrate by a soldering process using the solder alloy at a temperature ranging from 310 C.° to 320 C.° in a hydrogen reducing furnace. A semiconductor chip is mounted on a front surface of the insulative substrate.
1. A method for producing a semiconductor device, comprising:
preparing a solder alloy including antimony in a range of from 3 to 5 wt %, a trace amount of germanium from 0.01 to 0.2 wt %, and a balance of tin;
preparing an insulative substrate having conductor patterns on two surfaces thereof; and
mounting a heat sink plate on a back surface of the insulative substrate by a soldering process using the solder alloy at a temperature which is about 50 C.° above a melting point of the solder alloy and ranging from 310 C.° to 320 C.° in a furnace having a reducing atmosphere of hydrogen whereby an oxidation of the germanium removes oxidation layers from the antimony and tin to improve bonding performance.
2. A method for producing a semiconductor device according to claim 1 , further comprising mounting a semiconductor chip on a front surface of the insulative substrate.
3. A method for producing a semiconductor device according to claim 2 , wherein a back surface of the semiconductor chip and the conductor pattern on the front surface of the insulative substrate are soldered by the soldering process.
4. A method for producing a semiconductor device according to claim 1 , wherein electrodes disposed on a front surface of a semiconductor chip, and conductors for wiring are soldered by the soldering process.
5. A method for producing a semiconductor device according to claim 1 , wherein the insulative substrate is a ceramic substrate substantially composed of alumina, aluminum nitride, or silicon nitride, and has copper patterns on both surfaces of the substrate, and the heat sink plate is made of copper.
6. A method for producing a semiconductor device according to claim 1 , wherein the solder is completely melted in the soldering process to enhance a reduction ability of hydrogen.
7. A method for producing a semiconductor device according to claim 1 , wherein the solder alloy consists essentially of 3 to 5 wt % of antimony, 0.01 to 0.2 wt % of germanium, and a balance of tin.
8. A method for producing a semiconductor device according to claim 1 , further comprising forming an oxide layer of the germanium when the solder melts, to avoid an adverse effect on bonding performance of the solder alloy.
9. A method for producing a semiconductor device according to claim 8 , wherein a thickness of the oxide layer of the germanium is limited using up to 0.2 wt % germanium to provide the bonding performance and thermal fatigue characteristic.