Thin film transistor array substrate and method for fabricating same
An exemplary TFT array substrate includes an insulating substrate, a gate electrode provided on the insulating substrate, a gate insulating layer covering the gate electrode and the insulating layer, an amorphous silicon (a-Si) pattern formed on the gate insulating layer, a heavily doped a-Si pattern formed on the a-Si pattern, a source electrode formed on the gate insulating layer and the heavily doped a-Si pattern and a drain electrode formed on the gate insulating layer and the heavily doped a-Si pattern. The source electrode and the drain electrode are isolated by a slit formed between the source electrode and the drain electrode, and the a-Si pattern includes a high resistivity portion corresponding to the slit whose resistance is higher than a resistance of the a-Si material.
1 . A method for fabricating a thin film transistor (TFT) array substrate, the method comprising:
providing an insulating substrate;
forming a gate electrode on the insulating substrate;
forming a gate insulating layer on the gate electrode and the insulating substrate;
forming an amorphous silicon (a-Si) pattern and a heavily doped a-Si pattern;
forming a source electrode and a drain electrode on the heavily doped a-Si pattern, comprising etching a portion of the heavily doped a-Si pattern between the source electrode and the drain electrode to exposing the a-Si pattern; and
forming a high resistivity portion in the a-Si pattern between the source electrode and the drain electrode, wherein the high resistivity portion has a higher electrical resistance than other portions of the a-Si pattern.
2 . The method of claim 1 , wherein the high resistivity portion is formed by a process of exposing the a-Si pattern with ultraviolet light beams.
3 . The method of claim 1 , wherein the source electrode and the drain electrode function as a mask in forming the high resistivity portion.
4 . The method of claim 2 , wherein wavelengths of the ultraviolet light beams are in a range from 90 nm to 400 nm.
5 . The method of claim 1 , further comprising forming a passivation layer on the source electrode, the drain electrode, the high resistivity portion, and the gate insulating layer.
6 . The method of claim 5 , further comprising forming a through hole in the passivation layer, wherein the drain electrode is exposed at a position corresponding to the through hole.
7 . The method of claim 6 , wherein forming the through hole comprises etching a portion of the passivation layer above the drain electrode.
8 . The method of claim 7 , further comprising forming a transparent conductive layer on the passivation layer.
9 . The method of claim 8 , further comprising forming a pixel electrode by etching the transparent conductive layer.
10 . The method of claim 9 , wherein the drain electrode is electrically connected to the pixel electrode in the through hole.
11 . The method of claim 1 , wherein the insulating substrate is made from one of glass and quartz.
12 . The method of claim 8 , wherein the transparent conductive layer is made from one of indium-tin-oxide and indium-zinc-oxide.
13 . The method of claim 1 , wherein the gate electrode is made from material including any one or more items selected from the group consisting of aluminum, molybdenum, copper, chromium, and tantalum.
14 . The method of claim 1 , wherein the source and drain electrodes are made from material including any one or more items selected from the group consisting of aluminum, aluminum alloy, molybdenum, tantalum, and molybdenum-tungsten alloy.
15 . The method of claim 1 , wherein forming the a-Si pattern and the heavily doped a-Si pattern comprises forming an a-Si layer on the gate insulating layer, doping a top layer of the a-Si layer into a heavily doped a-Si layer, using a mask to expose the a-Si layer and the heavily doped a-Si layer, and etching portions of the heavily doped a-Si layer and the a-Si layer.
16 . A thin film transistor array substrate comprising:
an insulating substrate;
a gate electrode on the insulating substrate;
a gate insulating layer covering the gate electrode and the insulating substrate;
an amorphous silicon (a-Si) pattern formed on the gate insulating layer;
a heavily doped a-Si pattern formed on the amorphous a-Si pattern;
a source electrode formed on the gate insulating layer and the heavily doped a-Si pattern; and
a drain electrode formed on the gate insulating layer and the heavily doped a-Si pattern;
wherein the source electrode and the drain electrode are isolated from each other by a slit therebetween, and the a-Si pattern comprises a high resistivity portion corresponding to the slit, an electrical resistance of the high resistivity portion being higher than an electrical resistance of other portions of the a-Si pattern.
17 . The thin film transistor array substrate of claim 16 , wherein the high resistivity portion is an ultraviolet light beam exposed portion of the a-Si pattern.
18 . The thin film transistor array substrate of claim 17 , wherein the slit between the source electrode and the drain electrode also spans through at least part of the heavily doped a-Si pattern.