Method of manufacturing semiconductor device
View Patent ↗A method of manufacturing a semiconductor device comprising a wiring structure that includes a vertical wiring section is disclosed. The method comprises a step of forming an interlayer insulation film made of a low dielectric constant material on a wiring layer, a step of forming a silicon oxide film by CVD using SiH 4 gas and CO 2 gas on the interlayer insulation film, a step of forming a chemically amplified resist film to cover the silicon oxide film, and a step of forming a first opening in a position on the chemically amplified resist film where the vertical wiring section is to be formed.
1. A method of manufacturing a semiconductor device comprising a wiring structure formed using a dual damascene process, comprising;
sequentially forming a first interlayer insulation film and a second interlayer insulation film, at least one of the first and second interlayer insulation films being made of a low dielectric constant material;
forming a first silicon oxide film by CVD using SiH 4 gas and CO 2 gas over the second interlayer insulation film;
forming a first antireflection film containing nitrogen by CVD;
forming a first chemically amplified resist film to cover the first silicon oxide film;
forming a pattern of an opening in a position over the first chemically amplified resist film;
forming a via hole to extend through the first silicon oxide film, the first interlayer insulation film, and the second interlayer insulation film, while using the pattern formed over the first chemically amplified resist film as a mask;
filling the via hole with a filler;
forming a second silicon oxide film by CVD using SiH 4 gas and CO 2 gas over the first antireflection film and the filler;
forming a second antireflection film containing nitrogen by CVD;
forming a second chemically amplified resist film to cover the second antireflection film;
forming a pattern of a wiring groove in an area of the second chemically amplified resist film including the via hole;
forming the wiring groove by etching the second interlayer insulation film while using the second chemically amplified resist film as a mask; and
filling the via hole and the wiring groove with a conductive material.
2. The method of manufacturing a semiconductor device according to claim 1 , wherein at least one of the first antireflection film and the second antireflection film includes a silicon nitride film.
3. The method of manufacturing a semiconductor device according to claim 2 , wherein at least one of the first antireflection film and the second antireflection film is formed by plasma CVD using SiH 4 gas, NH 3 gas, and N 2 gas.
4. The method of manufacturing a semiconductor device according to claim 2 , wherein at least one of the first silicon oxide film and the second silicon oxide film is formed in the same processing chamber as the first antireflection film and the second antireflection chamber, respectively.