Plasma process detecting sensor
View Patent ↗The present invention provides a plasma process detecting sensor. In the plasma process detecting sensor, a hole diameter of an insulating film is spread with almost no spread of a hole diameter of an upper electrode. Therefore, when the plasma process detecting sensor is exposed to a plasma, positive ions incident onto the bottom of a contact hole are hard to collide with an inner wall surface of a hole main body of the insulating film. As a result, the inner wall surface of the hole main body of the insulating film is hard to undergo damage, and the generation of a defect level that assists electric conduction can be suppressed. It is thus possible to suppress age deterioration of a sensor function during the measurement of a charge-up under an environment of a plasma etching condition.
1. A plasma process detecting sensor comprising:
a substrate;
a first electrode selectively formed over the substrate in a state of being insulated from the substrate;
a first insulating film formed over the first electrode;
a second insulating film deposited over the first insulating film;
a second electrode selectively formed over a top surface of the second insulating film and exposed to a plasma during plasma etching;
a first opening formed in the second electrode;
a contact hole defined in the second insulating film and having a depth that extends from the first opening to a top surface of the first insulating film, a diameter of the contact hole on the top surface of the second insulating film being larger than the first opening;
a second opening formed in the first insulating film located below the contact hole and having a diameter smaller than the diameter of the first opening; and
a measuring device for measuring a difference in potential between the first and second electrodes during the plasma etching.
2. The plasma process detecting sensor of claim 1 , wherein the first insulating film is of a thickness smaller than that of the second insulating film.
3. The plasma process detecting sensor of claim 1 , wherein the first insulating film has a larger etching resistance than the second insulating film.
4. The plasma process detecting sensor of claim 1 , wherein the first insulating film includes a silicon nitride film.
5. The plasma process detecting sensor of claim 1 , wherein the second insulating film includes a silicon oxide film.
6. The plasma process detecting sensor of claim 1 , wherein the contact hole and the first and second openings are circular in a plan view.
7. A plasma process detecting sensor, comprising:
a substrate;
a first electrode formed on the substrate and being insulated from the substrate;
a first insulating film formed on the first electrode;
a second insulating film formed on the first insulating film;
a second electrode formed on a top surface of the second insulating film;
a contact hole formed in the second electrode and the first and second insulating films, the contact hole having a first opening formed in the second electrode, a second opening formed in the first insulating film, and a main part formed in the second insulating film, the main part being of a diameter larger than that of the first opening, the second opening being of a diameter smaller than that of the first opening; and a measuring device for measuring a difference in potential between the first and second electrodes during a plasma etching.