A mirror device comprises: an electrode placed on a substrate; a hinge which is connected to the electrode and which has a flat part at an end part on a side opposite to the electrode; and a mirror placed on the flat part, wherein a protrusion part formed on the flat part is placed between the flat part and the mirror.
1. A mirror device, comprising:
an electrode placed on a substrate;
a hinge connected to the electrode having a flat part at an end part of said hinge opposite to the electrode; and
a mirror supported by the hinge and placed on the flat part, wherein said flat part of said hinge further includes a protrusion extended from said flat part for placing the mirror thereon.
2. The mirror device according to claim 1 , wherein:
the protrusion is deposited on a layer on the flat part.
3. The mirror device according to claim 1 , wherein:
the protrusion part is made by etching the surrounding of the protrusion part of the flat part.
4. The mirror device according to claim 1 , wherein:
a plurality of the protrusion part is formed on the flat part.
5. The mirror device according to claim 1 , wherein:
the protrusion part is connected to the mirror in the inside thereof.
6. The mirror device according to claim 1 , wherein:
each of all sides, in a plain view, of the protrusion part is not perpendicular to the deflection direction of the mirror.
7. The mirror device according to claim 1 , wherein:
the protrusion part is a circle or oval in a plain view.
8. The mirror device according to claim 1 , wherein:
the height of the protrusion part from the hinge is no more than 0.1 μm.
9. The mirror device according to claim 1 , wherein:
the connection part is deposited by applying chemical vapor deposition (CVD).
10. The mirror device according to claim 1 , wherein:
the connection part is placed at a position offset from the center of a mirror.