A mirror device comprises: an electrode which is covered with a protective film made of a material containing a semiconductor material and is placed on a substrate; a mirror placed above the electrode; and an electrically conductive hinge placed between the mirror and the electrode, wherein an opening part is formed in a part of the protective film, and the hinge penetrates the protective film in the opening part thereof.
1. A mirror device, comprising:
an electrode placed on a substrate;
a protective film formed on the electrode;
a mirror placed above the electrode; and
a hinge which is joined to the electrode and is made of a semiconductor material, wherein the electrical resistance of the hinge is lower than that of the protective film.
2. The mirror device according to claim 1 , wherein:
the hinge is made of any of single crystal silicon (Si), poly-silicon and amorphous silicon, which contain an additive selecting from among the materials belonging to the III group or V group.
3. The mirror device according to claim 1 , wherein:
the protective film is made of any of poly-silicon, amorphous silicon and silicon carbide (SiC).
4. The mirror device according to claim 1 , wherein:
the hinge is made of a silicon material in which a metal is diffused.
5. The mirror device according to claim 1 , wherein:
the hinge and the protective film mutually contain the same material.
6. The mirror device according to claim 1 , wherein:
the hinge or protective film is connected to the ground (GND).
7. The mirror device according to claim 1 , further comprising:
an insulation layer or an air gap positioned between the hinge and the protective film.
8. The mirror device according to claim 1 , wherein:
the resistance of the hinge is no more than 1 GΩ.
9. The mirror device according to claim 1 , wherein:
the resistance of the hinge is no more than 500 MΩ.
10. The mirror device according to claim 1 , wherein:
a light-shield or stiction-preventing coating is deposited on the protective film surface so as to not influence the resistance value of the hinge.