Flip chip type light-emitting element
In a flip chip type light-emitting element of the present invention, an n type contact electrode 14 is formed on an n layer 11 exposed in a comb-tooth shape, a light transmission electrode 15 made of an ITO is formed over the entire surface of an upper surface of a p layer 13 and twenty pad electrodes 16 are formed at prescribed intervals on the light transmission electrode 15 . The plane form of the pad electrode 16 has four branches 16 b protruding in the form of a cross from a circular central part 16 a and the adjacent pad electrodes 16 connected to each other by the branches 16 b.
1. A flip chip type light-emitting element, comprising:
a III-group nitride semiconductor layer comprising an n layer, a p layer and an active layer formed between the n layer and the p layer, the n layer being exposed in a comb-tooth shape;
an n type contact electrode provided on the n layer;
a light transmission electrode provided on the p layer;
a plurality of pad electrodes provided on the light transmission electrode;
an insulating protective film that covers a surface of the III-group nitride semiconductor layer except a part of the pad electrodes; and
a reflecting film provided above the light transmission electrode and in the insulating protective film so as to reflect a light emitted from the active layer to a side of the n layer,
wherein at least one of the plurality of pad electrodes comprises a base part that is not covered with the insulating protective film, and a plurality of branch parts that is formed from the base part, and
wherein the base part is connected to a junction electrode provided above the reflecting film.
2. The flip chip type light-emitting element according to claim 1 , wherein the branch part is formed in a linear shape protruding from the base part.
3. The flip chip type light-emitting element according to claim 2 , wherein the branch part has a branching linear shape relative to the linear shape.
4. The flip chip type light-emitting element according to claim 1 , wherein the branch part is formed in a linear shape protruding in the form of a cross from the base part.
5. The flip chip type light-emitting element according to claim 1 , wherein the branch part is extended in the lower part of the reflecting film.
6. The flip chip type light-emitting element according to claim 1 , wherein the light transmission electrode comprises Indium Tin Oxide (ITO).
7. The flip chip type light emitting element according to claim 1 , further comprising a barrier layer located above the base part and the insulating protective film,
wherein the junction electrode is located above the barrier layer.
8. The flip chip type light emitting element according to claim 1 , wherein the branch part comprises a first branch that extends from the base part, and a second branch that extends from the first branch.
9. The flip chip type light emitting element according to claim 8 , wherein the second branch extends perpendicularly from the first branch.
10. The flip chip type light emitting element according to claim 1 , wherein the plurality of pad electrodes are connected to each other via the branch part.
11. The flip chip type light emitting element according to claim 1 , wherein the base part has a diameter of about 28 μm.
12. The flip chip type light emitting element according to claim 1 , wherein the branch part has a width of about 5 μm.
13. The flip chip type light emitting element according to claim 1 , wherein the reflecting film is encapsulated within the insulating protective film.
14. A light-emitting element, comprising:
a semiconductor layer comprising an n layer, a p layer, and an active layer located between the n layer and the p layer;
an n type contact electrode on the n layer;
a light transmission electrode provided on the p layer;
a plurality of pad electrodes provided on the light transmission electrode;
an insulating protective film that covers the semiconductor layer except a part of the pad electrodes; and
a reflecting film encapsulated within the insulating protective film,
wherein at least one of the plurality of pad electrodes comprises a base part that is not covered with the insulating protective film, and a plurality of branch parts that is formed from the base part, and
wherein the base part is connected to a junction electrode provided above the reflecting film.
15. The light emitting element according to claim 14 , further comprising a barrier layer located above the base part and the insulating protective film,
wherein the junction electrode is located above the barrier layer.
16. The light emitting element according to claim 14 , wherein the branch part comprises a first branch that extends from the base part, and a second branch that extends from the first branch.
17. The flip chip type light emitting element according to claim 16 , wherein the second branch extends perpendicularly from the first branch.
18. The flip chip type light emitting element according to claim 14 , wherein the plurality of pad electrodes are connected to each other via the branch part.
19. The flip chip type light emitting element according to claim 14 , wherein the base part has a diameter of about 28 μm.
20. The flip chip type light emitting element according to claim 14 , wherein the branch part has a width of about 5 μm.