Insulated gate-type semiconductor device having a low concentration diffusion region
A semiconductor 100 has a P − body region and an N − drift region in the order from an upper surface side thereof. A gate trench and a terminal trench passing through the P − body region are formed. The respective trenches are surrounded with P diffusion regions at the bottom thereof. The gate trench builds a gate electrode therein. A P −− diffusion region, which is in contact with the end portion in a lengthwise direction of the gate trench and is lower in concentration than the P − body region and the P diffusion region, is formed. The P −− diffusion region is depleted prior to the P diffusion region when the gate voltage is off. The P −− diffusion region serves as a hole supply path to the P diffusion region when the gate voltage is on.
1. An insulated gate-type semiconductor device having a body region which is located at an upper surface side within a semiconductor substrate and is a semiconductor of a first conductive type, and a drift region which is in contact with a lower face of the body region and is a semiconductor of a second conductive type, comprising:
a trench passing from an upper surface of the semiconductor substrate through the body region;
a gate insulating film positioned at a side wall of the trench;
a gate electrode located inside the trench facing to the body region through the gate insulating film;
a buried diffusion region which is positioned below the gate electrode, is surrounded with the drift region and surrounds a bottom of the trench therewith, and is a semiconductor of the first conductive type; and
a low concentration diffusion region which is in juncture with the body region and the buried diffusion region, is lower in concentration than the buried diffusion region, and is a semiconductor of the first conductive type.
2. The insulated gate-type semiconductor device according to claim 1 , wherein the low concentration region is depleted at least a part thereof in a direction of thickness prior to the buried diffusion region when a gate voltage is off.
3. The insulated gate-type semiconductor device according to claim 1 , wherein the low concentration diffusion region has a RESURF structure.
4. The insulated gate-type semiconductor device according to claim 1 , wherein the low concentration diffusion region is in contact with a side face at an end portion of the trench in a lengthwise direction as viewed from above.
5. The insulated gate-type semiconductor device according to claim 1 , wherein the buried diffusion region is formed in a longitudinal direction of depth of a trench as viewed from a section intersecting at right angles with the lengthwise direction as viewed from above the trench.
6. The insulated gate-type semiconductor device according to claim 1 , wherein the buried diffusion region is disposed at a position which enables a field peak to be formed respectively at two portions including a PN junction between the body region and the drift region and a PN junction between the buried diffusion region and the drift region.
7. The insulated gate-type semiconductor device according to claim 1 , wherein the low concentration diffusion region is in contact with one of side faces of the trench as viewed from a section intersecting at right angles with the lengthwise direction as viewed from above the trench.
8. The insulated gate-type semiconductor device according to claim 7 , wherein an epitaxial layer at a region of a connected portion between the low concentration diffusion region and the body region has a concentration higher than other regions of the epitaxial layer.
9. The insulated gate-type semiconductor device according to claim 1 , wherein the trench has such a layout as to be divided into a plurality of sub-trenches in a lengthwise direction as viewed from above, and the low concentration diffusion region is in contact with individual end portions of the sub-trenches.
10. The insulated gate-type semiconductor device according to claim 9 , wherein positions of the end portions of the sub-trenches in the lengthwise direction as viewed from above differ from each other with respect to adjacent trenches.
11. The insulated gate-type semiconductor device according to claim 9 , wherein positions of the end portions of the sub-trenches in the lengthwise direction as viewed from above are in line with respect to adjacent trenches.
12. The insulated gate-type semiconductor device according to claim 11 , further comprising:
a second trench which extends in directions intersecting at right angles with the lengthwise direction as viewed from above the trench and is positioned between the end portions of adjacent sub-trenches; and
an intermediate buried diffusion region which is surrounded with the drift region and surrounds a bottom of the second trench therewith, and is a semiconductor of the first conductive type.