Piezoelectric actuator
View Patent ↗A piezoelectric actuator ( 2 ) comprising a stack of one or more piezoelectric elements ( 4 ) defining an external surface, and passivation means ( 20 ) applied to the external surface of the stack, wherein the passivation means ( 20 ) includes a self-supporting polyimide material ( 20 b ) (e.g. in the form of a layer, film or membrane).
1. A piezoelectric actuator comprising:
a stack of piezoelectric elements defining an external surface, and
a passivation arrangement applied to the external surface of the stack,
wherein the passivation arrangement includes a layer of self-supporting polyimide film and a further protective layer in the form of a fluoroethylene-propylene coating or film applied to the polyimide film layer.
2. The piezoelectric actuator of claim 1 , wherein the polyimide film layer and the further protective layer are laminated prior to being applied to the actuator.
3. The piezoelectric actuator of claim 1 , wherein the passivation arrangement is arranged to cover the entire external surface of the actuator that is exposed to a moisture bearing environment, in use.
4. The piezoelectric actuator of claim 1 , wherein a bonding layer is disposed intermediate the polyimide film layer and the external surface of the actuator.
5. The piezoelectric actuator of claim 4 , wherein the bonding layer is applied only at the ends of the actuator so as to avoid electrically active area of the actuator.
6. The piezoelectric actuator of claim 4 , wherein the self-supporting polyimide film layer extends beyond upper and lower ends of the actuator and the bonding layer is applied only to the areas of the polyimide film layer that extend beyond said upper and lower ends.