Nanowhiskers with PN junctions, doped nanowhiskers, and methods for preparing them
View Patent ↗Nano-engineered structures are disclosed, incorporating nanowhiskers of high mobility conductivity and incorporating pn junctions. In one embodiment, a nanowhisker of a first semiconducting material has a first band gap, and an enclosure comprising at least one second material with a second band gap encloses said nanoelement along at least part of its length, the second material being doped to provide opposite conductivity type charge carriers in respective first and second regions along the length of the of the nanowhisker, whereby to create in the nanowhisker by transfer of charge carriers into the nanowhisker, corresponding first and second regions of opposite conductivity type charge carriers with a region depleted of free carriers therebetween. The doping of the enclosure material may be degenerate so as to create within the nanowhisker adjacent segments having very heavy modulation doping of opposite conductivity type analogous to the heavily doped regions of an Esaki diode. In another embodiment, a nanowhisker is surrounded by polymer material containing dopant material. A step of rapid thermal annealing causes the dopant material to diffuse into the nanowhisker. In a further embodiment, a nanowhisker has a heterojunction between two different intrinsic materials, and Fermi level pinning creates a pn junction at the interface without doping.
1. A method of producing a nanoelement of desired conductivity, the method comprising the steps of:
(1) forming a nanowhisker on a substrate by a chemical beam epitaxy method;
(2) changing at least one condition of growth in the chemical beam epitaxy method so that a coaxial layer is formed around the nanowhisker, wherein the coaxial layer has a thickness greater than 200 nm; and
(3) introducing dopant material into the coaxial layer by a vapor phase method, whereby charge carriers from the dopant material diffuse into the nanowhisker to create said desired conductivity.
2. The method of claim 1 , wherein forming a nanowhisker comprises depositing a III-V semiconductor material, wherein the coaxial layer comprises a III-V semiconductor material.
3. A method of making a device comprising:
providing a substrate;
forming a nanowhisker standing upright from the substrate; and
forming a coaxial layer around at least a portion of the nanowhisker,
wherein the coaxial layer has a thickness greater than 200 nm, the nanowhisker comprises a III-V semiconductor and the coaxial layer comprises a III-V semiconductor.
4. The method for claim 3 , further comprising forming a pn junction, wherein the nanowhisker comprises conductivity of a first type and the coaxial layer comprises conductivity of a second type.