Semiconductor device, method for fabricating the same, and transformer circuit using the same
View Patent ↗A semiconductor device, a method for fabricating the same, and a transformer circuit using the same are disclosed. The semiconductor device includes a trench metal oxide semiconductor (MOS) transistor for switching a load of current supplied from a power source, and a boost controller for controlling driving of the trench MOS transistor, the boost controller being formed with the trench MOS transistor on a single semiconductor device to form an integrated structure. In this structure, the physical space of the semiconductor device is reduced, thereby reducing the size of a DC-DC transformer circuit using the semiconductor device. It is possible to obtain finely-adjusted output values by controlling values of the ripple current and ripple voltage. A desired operational stability according to a variation in temperature can also be secured.
1. A semiconductor device comprising:
a trench metal oxide semiconductor (MOS) transistor adapted to provide a current load from a power source; and
a boost controller adapted or configured to control the trench MOS transistor, the boost controller being a single semiconductor device with the trench MOS transistor to form an integrated structure, wherein the boost controller comprises:
a lightly-doped P type epitaxial layer on the semiconductor substrate;
an N type well and a first P type well having a predetermined depth in the P type epitaxial layer;
an oxide film on each of the N type well and the P type well;
P and N type polysilicon gates on the oxide film, respectively;
P type source and drain electrodes in regions at opposite sides of the gate in the N type well;
N type source and drain electrodes in regions at opposite sides of the gate in the P type well;
a common drain on a back surface of the heavily-doped N+ type semiconductor substrate; and
a device isolation layer adapted or configured to isolate the boost controller from the trench MOS transistor.
2. The semiconductor device according to claim 1 , wherein the trench MOS transistor comprises:
a heavily-doped N+ type semiconductor substrate;
a lightly-doped N type layer on or in the heavily-doped N+ type semiconductor substrate;
a second P type well having a predetermined depth in the lightly-doped N type layer;
a gate in a trench in the lightly-doped N type layer extending through the second P type well;
N type sources adjacent to the gate;
a contact layer in contact with the N type sources;
an insulating layer covering the gate; and
the common drain on the back surface of the heavily-doped N+ type semiconductor substrate.
3. The semiconductor device according to claim 2 , wherein the trench MOS transistor further comprises:
a silicon oxide film between the gate and an inner wall of the trench.
4. The semiconductor device according to claim 3 , wherein the silicon oxide film has a thickness of 50 to 500 Å.
5. The semiconductor device according to claim 2 , wherein the trench has a depth of 1 to 2 μm.
6. The semiconductor device according to claim 2 , wherein the trench MOS transistor comprises:
a plurality of gates in a corresponding plurality of trenches.
7. The semiconductor device according to claim 1 , wherein the lightly-doped P type epitaxial layer has a thickness of 2.5 to 10 μm.
8. The semiconductor device according to claim 1 , wherein the trench MOS transistor concentrically surrounds the boost controller.
9. The semiconductor device according to claim 1 , wherein the common drain on the back surface of the heavily-doped N+ type semiconductor substrate comprises silver, copper or aluminum.
10. A transformer circuit, comprising:
a power source supplying a power;
an inductor adapted or configured to accumulate and discharge current;
a capacitor adapted or configured to charge, store and discharge energy from the inductor;
a diode adapted or configured to prevent a flow of current from the capacitor to the inductor; and
a semiconductor device adapted or configured to control a current load from the power source, energy accumulation, or discharge of the inductor, wherein the semiconductor device comprises:
a trench metal oxide semiconductor (MOS) transistor adapted or configured to switch the current load from the power source; and
a boost controller adapted or configured to control turning the trench MOS transistor on and off, the boost controller being a single semiconductor device with the trench MOS transistor to form an integrated structure, wherein the boost controller comprises:
a lightly-doped P type epitaxial layer on the semiconductor substrate;
an N type well and a P type well having a predetermined depth in the P type epitaxial layer;
an oxide film on each of the N type well and the P type well;
P and N type polysilicon gates on the oxide film, respectively;
P type source and drain electrodes in regions at opposite sides of the gate in the N type well;
N type source and drain electrodes in regions at opposite sides of the gate in the P type well;
a common drain on a back surface of the heavily-doped N+ type semiconductor substrate; and
a device isolation layer adapted or configured to isolate the boost controller from the trench MOS transistor.
11. The transformer circuit according to claim 10 , wherein the transformer circuit controls the current load from the power source, through the semiconductor device, to output a voltage equal to or higher than a voltage from the power source.
12. The transformer circuit according to claim 10 , further comprising:
a temperature sensor adapted or configured to detect a temperature or amount of heat from the semiconductor device, and thereby control an operation of the semiconductor device.
13. The transformer circuit according to claim 10 , wherein the inductor is coupled to the power source.
14. The transformer circuit according to claim 10 , wherein the lightly-doped P type epitaxial layer has a thickness of 2.5 to 10 μm.
15. The transformer circuit according to claim 10 , wherein the common drain on the back surface of the heavily-doped N+ type semiconductor substrate comprises silver, copper or aluminum.
16. The transformer circuit according to claim 10 , wherein the trench MOS transistor comprises:
a heavily-doped N+ type semiconductor substrate;
a lightly-doped N type layer on or in the heavily-doped N+ type semiconductor substrate;
a P type well having a predetermined depth in the lightly-doped N type layer;
a gate in a trench in the lightly-doped N type layer extending through the P type well;
N type sources adjacent to the gate;
a contact layer in contact with the sources;
an insulating layer covering the gates; and
the common drain on the back surface of the heavily-doped N+ type semiconductor substrate.
17. The transformer circuit according to claim 16 , wherein the trench MOS transistor further comprises:
a silicon oxide film between the gate and an inner wall of the trench, wherein the silicon oxide film has a thickness of 50 to 500 Å.
18. The transformer circuit according to claim 16 , wherein the trench MOS transistor comprises:
a plurality of gates in a corresponding plurality of trenches.
19. The transformer circuit according to claim 18 , wherein the trench MOS transistor concentrically surrounds the boost controller.
20. The transformer circuit according to claim 18 , wherein each of the trenches has a depth of 1 to 2 μm.