Bottom antireflective coatings exhibiting enhanced wet strip rates, bottom antireflective coating compositions for forming bottom antireflective coatings, and methods for fabricating the same
View Patent ↗Bottom antireflective coating (BARC) that exhibit enhanced wet strip rates, BARC compositions for fabricating such BARCs, and methods for manufacturing such BARC compositions are provided. According to one exemplary embodiment, a bottom antireflective coating (BARC) composition comprises an inorganic-based compound, an absorbing material, and a wet strip-rate modifier combination. The wet strip-rate modifier composition comprises a combination of a short chain linear alcohol and dipropylene glycol (DPG), a combination of the short chain linear alcohol and tetraethylene glycol (TEG), a combination of DPG and TEG, or a combination of the short chain linear alcohol, DPG, and TEG.
1. A bottom antireflective coating (BARC) composition comprising:
a silicon-comprising material;
an absorbing material that absorbs light in the ultraviolet range; and
a wet strip-rate modifier combination comprising a combination of dipropylene glycol (DPG) and tetraethylene glycol (TEG).
2. The BARC composition of claim 1 , wherein the wet strip-rate modifier combination further comprises n-propanol.
3. The BARC composition of claim 1 , wherein the wet strip-rate modifier combination further comprises ethanol.
4. The BARC composition of claim 1 , wherein the wet strip-rate modifier combination comprises from about 1 to about 15 wt. % of the BARC composition of DPG.
5. The BARC composition of claim 1 , wherein the wet strip-rate modifier combination comprises from about 0.05 to about 10 wt. % of the BARC composition of TEG.
6. The BARC composition of claim 1 , wherein the wet strip-rate modifier combination further comprises a dopant.
7. The BARC composition of claim 6 , wherein the dopant is phosphorous, boron, or a combination thereof.
8. The BARC composition of claim 1 , wherein the BARC composition further comprises a material modification agent selected from the group consisting of an adhesion promoter, a pH tuning agent, a catalyst, a cross-linking agent, a high-boiling point solvent, a capping agent, and a combination thereof.
9. The BARC composition of claim 1 , wherein the silicon-comprising material is a siloxane, a silsesquioxane, a silicate, a silazane, or a combination thereof.
10. A bottom antireflective coating (BARC) comprising:
a siloxane, a silsesquioxane, a silicate, a silazane, or a combination thereof;
an absorbing material that absorbs light in the ultraviolet range;
dipropylene glycol (DPG) and tetraethylene glycol (TEG), or the combination of dipropylene glycol (DPG) and tetraethylene glycol (TEG), or the combination of a short chain linear alcohol, and tetraethylene glycol (TEG) wherein the short chain linear alcohol is selected from a group consisting of ethanol, n-propanol and combinations thereof; and
a dopant selected from the group consisting of phosphorous, boron, and a combination thereof.