Image sensor and method for manufacturing the same
View Patent ↗Disclosed is an image sensor. The image sensor includes a semiconductor substrate including unit pixels, an interlayer dielectric layer including metal interconnections formed on the semiconductor substrate, a plurality of bottom electrodes formed on the interlayer dielectric layer in correspondence with the unit pixels, the plurality of bottom electrodes includes bottom electrodes having at least two different sizes, a photodiode formed on the interlayer dielectric layer including the bottom electrodes, and color filters formed on the photodiode in correspondence with the unit pixels.
1. An image sensor comprising:
an interlayer dielectric layer including metal interconnections on a semiconductor substrate, wherein the metal interconnections are arranged according to unit pixels;
a plurality of bottom electrodes on the interlayer dielectric layer in correspondence with the unit pixels, wherein the plurality of bottom electrodes comprises bottom electrodes having sizes different from each other;
a photodiode on the interlayer dielectric layer including the bottom electrodes; and
color filters on the photodiode arranged according to the unit pixels.
2. The image sensor according to claim 1 , wherein at least one of the bottom electrodes has a size smaller than a size of other bottom electrodes of the plurality of bottom electrodes.
3. The image sensor according to claim 2 , wherein the color filter aligned on the at least one bottom electrode having the smaller size is a green color filter.
4. The image sensor according to claim 2 , wherein the color filter aligned on the at least one bottom electrode having the smaller size is a red color filter.
5. The image sensor according to claim 2 , wherein the color filter aligned on the at least one bottom electrode having the smaller size is a blue color filter.
6. The image sensor according to claim 2 , further comprising a micro-lens disposed only on each color filter corresponding to the at least one bottom electrode having the smaller size.
7. The image sensor according to claim 1 , wherein the plurality of bottom electrodes are arranged in a checkerboard pattern of smaller sized and larger sized bottom electrodes.
8. The image sensor according to claim 7 , wherein the color filters comprise green color filters, red color filters, and blue color filters, wherein the green color filters are aligned on the smaller sized bottom electrodes, and the red color filters and blue color filters are aligned on the larger sized bottom electrodes.
9. The image sensor according to claim 7 , wherein the color filters comprise green color filters, red color filters, and blue color filters, wherein the green color filters are aligned on the larger sized bottom electrodes, and the red color filters and blue color filters are aligned on the smaller sized bottom electrodes.