Semiconductor device having via connecting between interconnects
View Patent ↗A first insulating film is provided between a lower interconnect and an upper interconnect. The lower interconnect and the upper interconnect are connected to each other by way of a via formed in the first insulating film. A dummy via or an insulating slit is formed on/in the upper interconnect near the via.
1. A method for fabricating a semiconductor device comprising the steps of:
(a) forming a first interconnect on a semiconductor substrate;
(b) forming a first insulating film on the first interconnect;
(c) forming in the first insulating film, a via hole connected to the first interconnect, a dummy hole which is arranged so as to be incapable of having current flow therethrough, and an interconnect trench connected to the via hole and the dummy hole; and
(d) depositing a conductive material in the via hole, the dummy hole and the interconnect trench, thereby forming a via, a dummy via and a second interconnect.
2. The method of claim 1 , wherein in the step (a) a first dummy interconnect is simultaneously formed on the semiconductor substrate, and
in the step (c) the dummy hole is connected to the first dummy interconnect.
3. The method of claim 1 , wherein in the step (c) the interconnect trench is comprised of a first interconnect trench portion and a second interconnect trench portion whose width is smaller than that of the first interconnect trench portion and which branches from the first interconnect trench portion, and
the via hole and the dummy hole are connected to the interconnect trench.
4. The method of claim 3 , wherein in the step (c) the dummy hole is connected to the branch point between the first and second interconnect trench portions or to the interconnect trench near the branch point.
5. The method of claim 1 , wherein the first insulating film has a multilayer structure including a SiN film and a SiO 2 film.
6. The method of claim 1 , wherein each of the first and second interconnects is connected to another element or an external electrode.
7. The method of claim 1 , wherein the first interconnect has a width smaller than that of the second interconnect.
8. The method of claim 2 , wherein the first dummy interconnect has a width smaller than that of the second interconnect.
9. The method of claim 1 , wherein the via and the dummy via are substantially circular in a plan view.
10. The method of claim 1 , wherein a planar shape of each of the via and the dummy via is substantially a square.
11. The method of claim 1 , wherein the first interconnect and the second interconnect extend in a same direction.
12. The method of claim 1 , wherein the dummy via is provided on an extended line along which the first interconnect extends.
13. The method of claim 1 , wherein the via and the dummy via are spaced at a distance of 25 μm or less.
14. The method of claim 1 , wherein a bottom of the dummy via is located deeper than a bottom of the via.
15. The method of claim 1 , wherein the second interconnect is comprised of a first interconnect portion and a second interconnect portion whose interconnect width is smaller than that of the first interconnect portion and which branches from the first interconnect portion, and
the via is connected to the second interconnect portion.
16. The method of claim 15 , wherein the dummy via is formed at or near the branch point between the first and second interconnect portions.
17. The method of claim 15 , wherein the dummy via is substantially rectangular in a plan view, and
a longer side of the dummy via and a longer side of the first interconnect portion are provided along a same direction.
18. The method of claim 1 , wherein the dummy via and the second interconnect are made of the same conductive film.
19. The method of claim 1 , wherein the dummy via includes a first and second end, the first end connected to the second interconnect and the second end surrounded by a second insulating film.
20. The method of claim 1 , wherein the dummy via includes a first and second end, the first end connected to the second interconnect and the second end connected to a first dummy interconnect, the first dummy interconnect being surrounded by a second insulating film.