Semiconductor device and the method of manufacturing the same
View Patent ↗A semiconductor device includes a semiconductor substrate; a metal electrode wiring laminate on the semiconductor substrate, the metal electrode wiring laminate being patterned with a predetermined wiring pattern; the metal electrode wiring laminate including an undercoating barrier metal laminate and aluminum or aluminum alloy film on the undercoating barrier metal laminate; and organic passivation film covering the metal electrode wiring laminate, wherein the barrier metal laminate is a three-layered laminate including titanium films sandwiching a titanium nitride film. The semiconductor device according to the invention facilitates improving the moisture resistance of the portion of the barrier metal laminate exposed temporarily in the manufacturing process, facilitates employing only one passivation film, facilitates preventing the failures caused by cracks from occurring and the failures caused by Si nodules remaining in the aluminum alloy from increasing.
1. A semiconductor device comprising:
a semiconductor substrate;
a metal electrode wiring laminate on the semiconductor substrate, the metal electrode wiring laminate including an undercoating barrier metal laminate and an aluminum film or an aluminum alloy film on the undercoating barrier metal laminate, the metal electrode wiring laminate being patterned with a predetermined wiring pattern; and
an organic passivation film covering the patterned metal electrode wiring laminate, exposed portions of the undercoating barrier metal laminate, and portions of the substrate not covered by the predetermined wiring pattern;
wherein the undercoating barrier metal laminate comprises a titanium nitride film sandwiched between two titanium films and the aluminum or aluminum alloy film is formed on the uppermost titanium film.
2. The semiconductor device according to claim 1 , wherein an uppermost one of the titanium films is from 20 nm to 100 nm in thickness.
3. The semiconductor device according to claim 1 , wherein the aluminum film or the aluminum alloy film is 3 μm or more in thickness.
4. The semiconductor device according to claim 1 , wherein the organic passivation film comprises a polyimide film.
5. The semiconductor device according to claim 1 , wherein the semiconductor substrate comprises a silicon semiconductor substrate and the aluminum alloy film comprises an aluminum-silicon alloy film.