Perpendicular magnetic recording medium and method of manufacturing the same and product thereof
View Patent ↗The quantity of oxide contained in a magnetic layer is controlled to control the crystal grains and the segregation structure for ensuring low noise characteristic in a granular magnetic layer of a perpendicular magnetic recording medium. The granular magnetic layer consists of ferromagnetic crystal grains and a nonmagnetic grain boundary region mainly of an oxide surrounding the ferromagnetic crystal grains. The perpendicular magnetic recording medium has a nonmagnetic underlayer composed of a metal or alloy having hexagonal closest-packed crystal structure. The ferromagnetic crystal grain is composed of an alloy containing at least cobalt and platinum. The volume proportion of the nonmagnetic grain boundary region mainly of the oxide falls within a range of 15% to 40% of the volume of the total magnetic layer.
1. A method of manufacturing a perpendicular magnetic recording medium, the method comprising the steps of:
depositing a nonmagnetic underlayer composed of a metal or an alloy having a hexagonal closest-packed (hcp) crystal structure on a nonmagnetic substrate;
depositing a magnetic layer consisting essentially of ferromagnetic crystal grains and a nonmagnetic grain boundary region essentially consisting of an oxide surrounding the ferromagnetic crystal grains by sputtering a composite target containing a ferromagnetic alloy and an oxide on the underlayer in an inert atmosphere,
wherein the ferromagnetic crystal grains are composed of an alloy containing at least cobalt and platinum,
wherein a volume of the nonmagnetic grain boundary region consisting essentially of the oxide falls within a range of 15% to 40% of a total volume of the magnetic layer,
wherein a volume occupied by the oxide contained in the composite target falls within a range of 20% to 35% of a total volume of the composite target, and
wherein the volume ratio of the oxide in the magnetic layer formed with the composite target is different from the volume ratio of the oxide in the composite target.
2. A method of manufacturing a perpendicular magnetic recording medium according to claim 1 , wherein the oxide in the composite target is an oxide of Mg, Cr, Ti, Zr, or Si.
3. A method of manufacturing a perpendicular magnetic recording medium according to claim 1 , wherein the oxide in the composite target is SiO 2 .
4. A method of manufacturing a perpendicular magnetic recording medium according to claim 2 , wherein the oxide in the magnetic layer is an oxide of Mg, Cr, Ti, Zr, or Si.
5. A method of manufacturing a perpendicular magnetic recording medium according to claim 3 , wherein the oxide in the magnetic layer is SiO 2 .